Apparatus, system, and method providing backside illuminated imaging device
Method, apparatus, and/or system providing a backside illuminated imaging device. A non-planar metallic or otherwise reflective layer is provided in an image pixel cell at the frontside of the device substrate to capture radiation passing through the device substrate. The non-planar surface is formed to be capable of reflecting substantially all such radiation back to a photosensor located in the same pixel cell.
1. An image pixel cell comprising:
a photosensor formed at a front side of a substrate and adapted to detect visible. radiation; and
a radiation reflector positioned at a front side of the substrate and having a non-planar reflecting surface facing toward the photosensor and expanding laterally beyond the photosensor, the non-planar reflecting surface reflecting radiation components of the visible radiation, received through a backside of the substrate, to the photosensor,
wherein the non-planar reflecting surface comprises a substantially flat middle portion and an edge portion, the edge portion being a curved concave surface.
2. The image pixel cell of claim 1 , wherein the radiation reflector comprises a reflective metal coating.
3. The image pixel cell of claim 1 , wherein the radiation reflector is a part of an interconnecting metal portion.
4. The image pixel cell of claim 1 further comprising a substantially transparent dielectric formed in contact with the radiation reflector, wherein the dielectric has a surface shape complementary to the non-planar surface of the radiation reflector.
5. The image pixel cell of claim 1 further comprising a color filter positioned at a backside of the substrate for passing a selected radiation component of the visible radiation.
6. The image pixel cell of claim 1 , wherein the pixel cell is a CMOS pixel cell.
7. An image pixel cell in a backside illuminated imaging device, the image pixel cell comprising:
a substrate having a first side and a second side;
a metallic portion positioned at the first side of the substrate and comprising a non-planar surface facing toward the first side of the substrate; and
a photosensor formed at the first side of the substrate for detecting incident radiation impinged on the second side of the substrate and reflected by the metallic portion,
wherein the metallic portion expands laterally beyond the photosensor, and
wherein the non-planar surface comprises a substantially flat middle portion and an edge portion, the edge portion being a curved concave surface.
8. The image pixel cell of claim 7 , wherein the edge portion is capable of directing substantially all light components reaching such edge portion toward the photosensor.
9. A backside illuminated imaging device comprising:
a substrate having a frontside and a backside;
a plurality of photosensors formed in association with the substrate;
a color filter array formed over the substrate at the backside and comprising a plurality of color filters for passing selected radiation components of incident radiation to the photosensors; and
a plurality of radiation reflectors formed over the substrate at the frontside and each corresponding to a photosensor;
wherein the radiation reflectors each expand laterally beyond the photosensor and have a non-planar surface capable of directing photons reaching the non-planar surface toward the corresponding photosensor, and
wherein the non-planar surface comprises a substantially flat middle portion and an edge portion, the edge portion being a curved concave surface.
10. The imaging device of claim 9 , wherein the color filter array causes the photosensors to detect red, green, and blue light.
11. The imaging device of claim 9 , wherein the color filter array causes the photosensors to detect cyan, magenta, and yellow light.
12. The imaging device of claim 9 , wherein the edge portion being capable of directing substantially all photons reaching the edge portion toward the photo sensor.
13. The imaging device of claim 9 , wherein the imaging device is part of a camera.
14. A backside illuminated imaging system comprising:
a substrate having a frontside and a backside;
a plurality of photosensors formed in the substrate and arranged in an array;
a metallic portion formed over the substrate at the frontside and having a plurality of radiation reflectors; and
a readout circuit reading out signals from the photosensors,
wherein the radiation reflectors each expand laterally beyond the photosensor and have a non-planar surface facing toward the frontside of the substrate and corresponding to a photosensor;
wherein the non-planar surface comprises a substantially flat middle portion and an edge portion, the edge portion being a curved concave surface; and
wherein each radiation reflector is capable of directing photons reaching the non-planar surface toward the corresponding photosensor.
15. The imaging system of claim 14 further comprising a dielectric formed over the substrate at the backside, wherein the dielectric comprises a plurality of protruding portions facing away from the substrate, and wherein the protruding portions each define the shape of a corresponding non-planar surface of a radiation reflector.
16. The imaging system of claim 14 , wherein at least one of the non-planar surfaces comprises a concave shape.
17. The imaging system of claim 14 , wherein the edge portion is capable of directing substantially all photons reaching the edge portion toward the corresponding photosensor.
18. The imaging system of claim 14 further comprising at least one interconnecting metal portion, wherein the interconnecting metal portion comprises a metallization pattern for interconnecting components of the imaging system.
19. The image system of claim 18 , wherein the metallic portion forms at least a part of the interconnecting metal portion.
20. The image system of claim 18 , wherein the metallic portion is formed without metallization patterns.