Method for programming a semiconductor memory device

1. A method for programming a semiconductor memory device comprising such a program sequence as to program target threshold levels constituting multi-level data into multiple memory cells, which are simultaneously selected, wherein

the program sequence is controlled to finish programming the multiple memory cells in order of height of the target threshold levels; wherein

the program sequence is to program target threshold levels C, B and A (where C>B>A) from a certain threshold level into the multiple memory cells, and wherein step-up voltages ΔVPGMC, ΔVPGMB and ΔVPGMA of the program voltages of the target threshold levels C, B and A, respectively, are set to satisfy the following relationship of:

ΔVPGMB<ΔVPGMA<ΔVPGMC.

2. The method according to claim 1 , wherein

the program sequence is executed with program cycles repeated in such a way that a program voltage is stepped-up every program cycle, the program cycle including: applying the program voltage to the multiple memory cells; and program-verifying them, and wherein

while certain memory cells to be programmed to a certain target threshold level are programmed, the remaining memory cells to be programmed to other target threshold levels are set in a program-inhibiting state, and

initial program voltages and step-up voltages thereof used for programming the respective target threshold levels are set to be suitable in accordance with the target threshold levels.

3. The method according to claim 2 , wherein

the initial program voltage is obtained by amending another initial program voltage used in an advanced program operation with reference to the number of program cycles in the advanced program operation.

4. The method according to claim 2 , wherein

the program sequence comprises:

performing program speed judgment for memory cells to be programmed to a certain target threshold level at the beginning of the program cycles, thereby distinguishing between slow cells and fast cells, the former being lower in program speed than the latter; and

continuing the remaining program cycles in such a manner as to program the slow cells and fast cells with different program voltages applied, and verify-read them simultaneously.

5. The method according to claim 4 , wherein

the scheme for programming the slow cells and fast cells with different program voltages applied is adapted to at least the uppermost one within the threshold levels to be programmed.

6. The method according to claim 4 , wherein

the program speed judgment is performed as a verify-read operation with a verify voltage set at substantially the central value of an obtained threshold distribution.

7. The method according to claim 4 , wherein

the program sequence is an upper page program sequence for programming four-level data after finishing a lower page program sequence, and wherein

the number of program cycles required for setting the initial program voltage used in the upper page program sequence is obtained in the lower page program sequence.

8. The method according to claim 4 , wherein

the program sequence is for straightly programming data levels A, B and C from an erase data level E in order from the highest level C (where, E<A<B<C), and wherein

the number of program cycles required for setting the initial program voltage is obtained in a dummy lower page program mode.

9. The method according to claim 4 , wherein

the program sequence is for straightly programming data levels A, B and C from an erase data level E in order from the highest level C (where, E<A<B<C), and wherein

the number of program cycles required for setting the initial program voltage is obtained in a wafer test mode.

10. The method according to claim 4 , wherein

with respect to programming the slow cells and fast cells on a selected word line, the slow cells are programmed with a certain program voltage ahead of the fast cells, and the program voltage is stepped-down and applied to the fast cells.

11. The method according to claim 1 , wherein

the semiconductor memory device includes a memory cell array, in which NAND strings are arranged, the NAND string having a plurality of electrically rewritable and non-volatile memory cells connected in series.

12. A method for programming a semiconductor memory device comprising such a program sequence as to program target threshold levels constituting multi-level data into multiple memory cells, which are simultaneously selected, wherein

the program sequence comprises: distinguishing between slow cells and fast cells with respect to memory cells to be programmed to a certain target threshold, the former being lower in program speed than the latter;

applying a program voltage pulse to the multiple memory cells, in which the program voltage is changed in level in correspondence with not only different target threshold levels to be programmed but also the slow cells and fast cells to be programmed to the certain target threshold level; and

verify-reading the memory cells after applying the program voltage pulse; wherein

the program sequence is to program target threshold levels C, B and A (where C>B>A) from a certain threshold level into the multiple memory cells, and wherein step-up voltages ΔVPGMC, ΔVPGMB and ΔVPGMA of the program voltages of the target threshold levels C, B and A, respectively, are set to satisfy the following relationship of:

ΔVPGMB<ΔVPGMA<ΔVPGMC.

13. The method according to claim 12 , wherein

in the program sequence, until when all memory cells to be programmed to a first threshold level reaches a second threshold level lower than the first threshold level, memory cells to be programmed to the second threshold level are kept in a program-inhibiting state.

14. The method according to claim 12 , wherein

the program voltage pulse application and verify-reading operation are repeatedly performed in the program sequence by stepping-up the program voltage pulse by a constant level every program cycle.

15. The method according to claim 12 , wherein

the semiconductor memory device includes a memory cell array, in which NAND strings are arranged, the NAND string having a plurality of electrically rewritable and non-volatile memory cells connected in series.

16. A method for programming a semiconductor memory device comprising such a program sequence as to program target threshold levels constituting multi-level data into multiple memory cells, which are simultaneously selected, wherein

the program sequence is controlled to finish programming the multiple memory cells in order of height of the target threshold levels, wherein

the program sequence is executed with program cycles repeated in such a way that a program voltage is stepped-up every program cycle, the program cycle including: applying the program voltage to the multiple memory cells; and program-verifying them, and wherein

while certain memory cells to be programmed to a certain target threshold level are programmed, the remaining memory cells to be programmed to other target threshold levels are set in a program-inhibiting state, and

initial program voltages and step-up voltages thereof used for programming the respective target threshold levels are set to be suitable in accordance with the target threshold levels, wherein

the program sequence comprises:

performing program speed judgment for memory cells to be programmed to a certain target threshold level at the beginning of the program cycles, thereby distinguishing between slow cells and fast cells, the former being lower in program speed than the latter; and

continuing the remaining program cycles in such a manner as to program the slow cells and fast cells with different program voltages applied, and verify-read them simultaneously, wherein

the program sequence is for straightly programming data levels A, B and C from an erase data level E in order from the highest level C (where, E<A<B<C), and wherein the number of program cycles required for setting the initial program voltage is obtained in the program cycle of data level C.