Substrate processing method and fabrication process of a semiconductor device
A method of fabricating a semiconductor device includes the steps of forming a via-hole in an interlayer insulation film such that a metal interconnection pattern formed underneath the interlayer insulation film is exposed at a bottom of the via-hole, forming a conductive barrier film on the interlayer insulation film so as to cover a sidewall surface of the via-hole and the exposed metal interconnection pattern in conformity with a shape of the via-hole and forming a metal film on the conductive barrier film, wherein there is provided a preprocessing step, after the step of forming the via-hole but before the step of forming the conductive barrier film, of processing the interlayer insulation film including the sidewall surface of the via-hole and a bottom surface of the via-hole, with plasma containing hydrogen having energy not causing sputtering of the metal interconnection pattern.
1. A method of fabricating a semiconductor device, comprising:
forming a via-hole in an interlayer insulation film containing a methyl group such that a metal interconnection pattern formed underneath said interlayer insulation film is exposed at a bottom of said via-hole;
forming a conductive barrier film on said interlayer insulation film so as to cover a sidewall surface of said via-hole and said exposed metal interconnection pattern in conformity with a shape of said via-hole; and
forming a metal film on said conductive barrier film,
wherein there is provided a preprocessing step,
after said forming said via-hole but before said forming said conductive barrier film, processing said interlayer insulation film including said sidewall surface of said via-hole and a bottom surface of said via-hole, with plasma containing hydrogen having energy not causing sputtering of said metal interconnection pattern, such that a surface of said interlayer insulation film, said sidewall surface of said via-hole and said bottom surface of said via-hole are terminated by hydrogen,
wherein said plasma in said preprocessing step is a mixed gas plasma of a rare gas and a reducing gas containing hydrogen,
said plasma has an electron temperature not exceeding 3 eV, and
said plasma is excited by radiating a microwave from a planar antenna.
2. The method as claimed in claim 1 , wherein said forming said conductive barrier film comprises covering said surface of said interlayer insulation film with a conductive nitride film including said sidewall surface and bottom surface of said via-hole, and covering said conductive nitride film by a refractory metal film.
3. The method as claimed in claim 2 , wherein said forming said conductive nitride film comprises:
a first step covering said surface of said interlayer insulation film and said sidewall surface and bottom surface of said via-hole by organic metal source molecules containing nitrogen; and a second step decomposing said organic metal source molecules, said first step and said second step being repeated with intervening purging steps.
4. The method as claimed in claim 3 , wherein said forming said refractory metal film comprises a third step covering a surface of said conductive nitride film with metal source molecules containing a refractory metal element constituting said refractory metal film and a fourth step decomposing said metal source molecules, said third step and said fourth step being repeated with intervening purging steps.
5. The method as claimed in claim 1 , wherein said interlayer insulation film is an SiOCH film formed by plasma CVD process.
6. The method as claimed in claim 1 , wherein said interlayer insulation film is an inorganic SOD film.
7. The method as claimed in claim 1 , wherein said interlayer insulation film comprises an organic polymer film.
8. The method as claimed in claim 1 , wherein said interlayer insulation film is a porous film.
9. The method as claimed in claim 1 , wherein said forming said conductive barrier film is carried out in a first processing vessel, and wherein said forming said metal film is conducted in a second processing vessel connected to said first processing vessel via a vacuum substrate transportation chamber.
10. The method as claimed in claim 1 , wherein said planar antenna comprises a radial line slot antenna.
11. The method as claimed in claim 1 , wherein said planar antenna is provided at a top part of a processing vessel in which said preprocessing step is carried out.
12. A substrate processing method, comprising:
forming a via-hole in an insulation film containing a methyl group so as to expose a metal pattern formed underneath said insulation film at a bottom of said via-hole; and
forming a conductive barrier film on said insulation film in conformity with a shape of said via-hole such that conductive barrier film covers a sidewall surface of said via-hole and said metal pattern exposed at said bottom of said via-hole,
wherein there is provided a preprocessing step, after said forming said via-hole but before said forming said conductive barrier film, processing said interlayer insulation film including said sidewall surface of the via-hole and a bottom surface of said via-hole, with plasma containing hydrogen having energy not causing sputtering of said metal pattern, such that a surface of said interlayer insulation film is terminated with hydrogen including said sidewall surface of said via-hole and said bottom surface of said via-hole,
wherein said plasma in said preprocessing step is a mixed gas plasma of a rare gas and a reducing gas containing hydrogen,
said plasma has an electron temperature not exceeding 3 eV, and
said plasma is excited by radiating a microwave from a planar antenna.