Organic semiconductor device and its manufacturing method
An organic semiconductor device in which an organic semiconductor layer is easily formed into a pattern, and a method of manufacturing same. On a substrate, a first structural portion including a first electrode, an organic semiconductor layer made of an organic compound having a semiconductor property, and a second structural portion having a second electrode are provided in order. The second structural portion is formed in a prescribed pattern. The second structural portion includes a mask portion having an etching-resistant property, and etching of the organic semiconductor layer is performed while using the mask portion as a mask. The mask portion may be the second electrode.
1. A method of manufacturing an organic electroluminescence display panel, including a substrate, and at least one of organic electroluminescence elements having a first structural portion having a first electrode formed on/over said substrate, an organic semiconductor layer made of an organic compound having a semiconductor property, and a second structural portion confronting said first structural portion with said organic semiconductor layer and having a second electrode, wherein the organic electroluminescence display panel further comprising a lead electrode formed on/over said substrate and connected to said second electrode, the method comprising:
a first structural portion formation process of forming said first structural portion on said substrate;
an organic semiconductor layer formation process of forming said organic semiconductor layer on said first structural portion;
a second structural portion formation process of forming said second structural portion on said organic semiconductor layer; and
an etching process of etching said organic semiconductor layer while using a mask,
wherein further comprising a process of removing a portion of said organic semiconductor layer before making the mask,
the method of manufacturing an organic electroluminescence display panel further comprising a lead electrode formation process of forming said lead electrode on said substrate;
wherein said organic semiconductor layer formation process including the process of removing a portion of said organic semiconductor layer on said lead electrode and of forming a window portion; and
wherein said second structural portion formation process including a second electrode formation process of forming said second electrode connected to said lead electrode via said window portion, and the etching process of etching said organic semiconductor layer while using said second electrode as the mask.
2. A method of manufacturing an organic electroluminescence display panel, including a substrate, and at least one of organic electroluminescence elements having a first structural portion having a first electrode formed on/over said substrate, an organic semiconductor layer made of an organic compound having a semiconductor property, and a second structural portion confronting said first structural portion with said organic semiconductor layer and having a second electrode, comprising:
a first structural portion formation process of forming said first structural portion on said substrate;
an organic semiconductor layer formation process of forming said organic semiconductor layer on said first structural portion; and
a second structural portion formation process of forming said second structural portion on said organic semiconductor layer, and
an etching process of etching said organic semiconductor layer while using a mask,
wherein further comprising a process of removing a portion of said organic semiconductor layer before making the mask,
wherein said second structural portion formation process including the process of removing a portion of said organic semiconductor layer and providing a bonding area, a second electrode formation process of forming said second electrode on said organic semiconductor layer, a sealing process of bonding a sealing can to said bonding area and sealing said organic electroluminescence elements, and the etching process of etching said organic semiconductor layer while using said sealing can as the mask.