Semiconductor device having recessed channel and method for manufacturing the same
A semiconductor device having a recessed channel and a method for manufacturing the same. The semiconductor device comprises a semiconductor substrate formed with an isolation layer defining an active region including a channel region and a junction region, a recessed trench including a top trench formed within the channel region of the semiconductor substrate and a bottom trench formed from a bottom surface of the top trench with a width narrower than the top trench, and a gate stack overlapping the recessed trench and extending across the active region.
1. A semiconductor device with a recessed channel, the semiconductor device comprising:
a semiconductor substrate with an isolation layer defining an active region, said active region comprising a channel region and a junction region, wherein the isolation layer adjacent to the channel region is lower than the isolation layer adjacent to the junction region;
a recessed trench comprising a top trench formed within the channel region and a bottom trench formed from a bottom surface of the top trench with a width narrower than the top trench; and
a gate stack filling the recessed trench and extending across the active region.
2. The semiconductor device of claim 1 , wherein the recessed trench comprises a first protrusion disposed in a short axial direction of the active region, a second protrusion, and a bottom surface connecting the first protrusion and the second protrusion.
3. The semiconductor device of claim 2 , wherein the first protrusion and the second protrusion comprise a outer sidewall, a top surface, and a inner sidewall.