Method for manufacturing laser devices
A method for manufacturing a laser device includes fixing a laser chip to a holder via a metal having a low melting point by melting the metal at a temperature higher than the melting point, heating the holder to which the laser chip is fixed at a heat treatment temperature that is lower than the melting point and, thereafter, sealing the laser chip by covering the holder to which the laser chip is fixed with a cap. The heating step may be performed in an atmosphere in which ozone is generated or an atmosphere in which oxygen plasma is generated. Furthermore, the holder to which the laser chip is fixed is covered with a cap to make a hermetically sealed package in dry air or an inert gas, and then an ultraviolet ray is irradiated into the package while it is heated.
1. A method for manufacturing a laser device, comprising the steps of:
fixing a laser chip to a holder via a metal having a low melting point by melting the metal at a temperature higher than the melting point;
heating the holder to which the laser chip is fixed and a cap at a heat treatment temperature that is lower than the melting point; and
sealing the laser chip after the heating step by covering the holder to which the laser chip is fixed with the cap.
2. The method according to claim 1 ,
wherein the heating step is performed in an atmosphere in which ozone is generated.
3. The method according to claim 1 ,
wherein the heating step is performed in an atmosphere in which oxygen plasma is generated.
4. The method according to claim 1 ,
wherein the heating step is performed at the heat treatment temperature that is lower than the melting point by 20° C. or more.
5. The method according to claim 1 ,
wherein the heating step is performed for 10 minutes or longer.
6. The method according to claim 1 ,
wherein the metal having a low melting point is an Au—Sn alloy containing Sn more than or equal to 15% by weight and less than or equal to 90% by weight, and
the heating step is performed at the heat treatment temperature of 175° C. or higher.
7. The method according to claim 2 ,
wherein the heating step that is performed in the atmosphere in which ozone is generated includes preventing the laser chip from being irradiated directly with an ultraviolet ray for generating ozone.
8. The method according to claim 1 ,
wherein the heating step is performed in an atmosphere filled with a gas selected from a group consisting of nitrogen, hydrogen, helium and xenon, or with a combination of two or more gases selected from said group.
9. The method according to claim 1 ,
wherein the sealing step includes hermetical sealing of the laser chip after filling a filler gas having a dew point of −10° C. or lower.
10. The method according to claim 1 ,
wherein the heating step includes heating the holder to which the laser chip is fixed and the cap in an atmosphere having a dew point of −10° C. or lower.
11. The method according to claim 1 ,
wherein the scaling step includes hermetical sealing of the laser chip after filling a gas selected from a group consisting of dry air, nitrogen, oxygen, hydrogen, argon, helium and xenon, or filling a combination of two or more gases selected from said group.
12. The method according to claim 1 ,
wherein a time period of 60 minutes or shorter for exposing the holder to which the laser chip is fixed to atmosphere is provided between the heating step and the sealing step.
13. The method according to claim 1 ,
wherein the laser chip has a light emission wavelength of 500 nm or shorter.
14. The method according to claim 1 ,
wherein the laser chip is a nitride semiconductor laser chip.