Inductor device and method of manufacturing the same
An inductor device formed on a semiconductor substrate includes an inductor body penetrating the semiconductor substrate, taking a spiral shape and having a conductivity, and an insulating film provided between a side surface of the inductor body and the semiconductor substrate.
1. An inductor device formed on a semiconductor substrate comprising:
a plurality of first conductive members formed in first trenches penetrating the semiconductor substrate and disposed concentrically;
a plurality of second conductive members formed in second trenches penetrating the semiconductor substrate and disposed concentrically;
an insulating film provided between side surfaces of the first conductive members and side surfaces of the second conductive members and between the side surfaces of the first and second conductive members and the semiconductor substrate;
an insulating film provided on an upper surface of the semiconductor substrate and on an upper surface of the first and second conductive members;
an insulating film provided on a lower surface of the semiconductor substrate and on a lower surface of the first and second conductive members; and
a conducive member connecting wiring pattern electrically connecting the first conductive member to the second conductive member which is adjacent to the first conductive member,
wherein the first conductive member and the second conductive member are alternately disposed through the insulating film.
2. The inductor device according to claim 1 , wherein a structure formed by the first conductive members, the second conductive members and the conductive member connecting wiring pattern takes a spiral shape seen on a plane.
3. The inductor device according to claim 2 , further comprising:
magnetic bodies provided in a vertical direction of the structure respectively.