IP Library Granted Patent US 7,792,393
Granted Patent B2
US 7,792,393 · App. 12/110,153 · Granted Sep 7, 2010

Silicon waveguide photodetector and related method

Assignee: California Institute of Technology
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,792,393
App. No.
12/110,153
Granted
Sep 7, 2010
Kind
B2
Abstract

A photodetector device, comprises an optical input, a nanoscale silicon waveguide and an electrical output. The waveguide is a high-contrast waveguide, with a refractive index contrast with the outside environment of more that 10%. The optical mode distribution across the waveguide has a peak intensity in correspondence of surface states of the nanoscale silicon waveguide. A related method is also disclosed.

Claims (23)

1. A photodetector device, comprising:

an optical input:

a nanoscale silicon waveguide having a refractive index contrast with the outside environment of more that 10%, the nanoscale silicon waveguide connected with the optical input; and

an electrical output connected with the nanoscale silicon waveguide, wherein optical mode distribution across the nanoscale silicon waveguide has a peak intensity in correspondence of surface states of the nanoscale silicon waveguide.

2. The photodetector device of claim 1 , wherein the electrical output is originated due to surface state absorption of the nanoscale silicon waveguide.

3. The photodetector device of claim 1 , wherein the optical input has a wavelength ranging from ultraviolet to infrared.

4. The photodetector device of claim 3 , wherein the optical input has a near infrared wavelength.

5. The photodetector device of claim 1 , wherein the nanoscale silicon waveguide is connected to the optical input through a grating coupler.

6. The photodetector device of claim 1 , wherein the nanoscale silicon waveguide comprises an optically active area.

7. The photodetector device of claim 6 , wherein the optically active area of the nanoscale silicon waveguide is an electrically contacted optically active area.

8. The photodetector device of claim 7 , wherein a bias voltage is applied to the electrically contacted optically active area.

9. The photodetector device of claim 8 , wherein the electrically contacted optically active area is electrically contacted to a metal contact through a plurality of conductive contacting arms.

10. The photodetector device of claim 1 , wherein the nanoscale silicon waveguide is a slot waveguide.

11. The photodetector device of claim 1 , wherein the nanoscale silicon waveguide is a ridge waveguide.

12. The photodetector device of claim 11 , further comprising a first voltage contact and a second voltage contact, wherein the ridge waveguide contacts the first voltage contact by way of a plurality of conductive contacting arms, and the second voltage contact is the electrical output of the photodetector device.

13. A method for detecting light in a ultraviolet to infrared range through a nanoscale silicon waveguide, comprising:

inputting light to a nanoscale silicon waveguide having a refractive index contrast with the outside environment of more that 10%, an optical mode distribution across the nanoscale silicon waveguide being configured so that the optical mode has a peak intensity in correspondence of surface states of the nanoscale silicon waveguide; and

outputting an electrical signal from the nanoscale silicon waveguide.

14. The method of claim 13 , wherein detected light has a near infrared wavelength.

15. The method of claim 13 , wherein light is input to the nanoscale silicon waveguide through a grating coupler.

16. The method of claim 13 , further comprising associating a first and a second metal contact with the nanoscale silicon waveguide, wherein the first metal contact is connected to the nanoscale silicon waveguide through a plurality of conductive arms and the second metal contact is for the outputting of the electrical signal from the nanoscale silicon waveguide.

17. The method of claim 16 , further comprising applying a bias voltage to the first metal contact.

18. The method of claim 13 , wherein the nanoscale silicon waveguide is a slot waveguide or a ridge waveguide.

Assignments (2)
CONFIRMATORY LICENSE Recorded Apr 20, 2011
From: CALIFORNIA INSTITUTE OF TECHNOLOGY
To: DARPA
Reel/Frame 026159/0400 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 31, 2008
From: HOCHBERG, MICHAEL J.; BAEHR-JONES, TOM; SCHERER, AXEL
To: CALIFORNIA INSTITUTE OF TECHNOLOGY
Reel/Frame 021325/0395 →
Continuity (3)
Provisional Application 6092640200 · Apr 26, 2007
Provisional Application 6092831200 · May 8, 2007
Related Publication 20090052830A1 · Feb 26, 2009