Techniques for providing a multimode ion source
View Patent ↗Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation comprising an ion source that operates in multiple modes such that a first mode is an arc-discharge mode and a second mode is an RF mode.
1. An apparatus for ion implantation, the apparatus comprising:
an ion source that operates in multiple modes, wherein a first mode is an arc-discharge mode and a second mode is an RF mode
an RF power supply;
a cathode;
a repeller; and
a first additional electrode, wherein the cathode, the repeller, and the first additional electrode are connected to the RF power supply.
2. The apparatus of claim 1 , further comprising a switch for switching between the multiple modes.
3. The apparatus of claim 1 , further comprising an RF matching network for operating the ion source in the RF mode.
4. The apparatus of claim 1 , further comprising a gas source configured to supply at least one of diborane, pentaborane, carborane, octadecaborane, decaborane, boron, arsenic, phosphorus, indium, germanium, and carbon.
5. The apparatus of claim 1 , further comprising a second additional electrode to provide greater electrode area, wherein the second additional electrode is connected to the RF power supply.
6. A mull-mode ion source, the ion source comprising:
a chamber that supports multiple modes of operation, wherein a first mode of operation is an arc-discharge mode and a second mode of operation is an RF mode;
an indirectly heated cathode comprising a filament and a cathode;
a repeller; and
an RF power supply and an RF matching network, wherein the RF power supply is connected to the cathode and the repeller.
7. The ion source of claim 6 , further comprising a switch for switching between the multiple modes of operation.
8. The ion source of claim 6 , further comprising a gas configured to supply at least one of diborane, pentaborane, carborane, octadecaborane, decaborane, boron, arsenic, phosphorus, indium, germanium, and carbon.
9. The ion source of claim 6 , further comprising a first additional electrode to provide greater electrode area.
10. The ion source of claim 6 , further comprising a first additional electrode and a second additional electrode to provide to provide greater electrode area.
11. A method for ion implantation in multiple modes, the method comprising:
supplying a current to a filament in an indirectly heated cathode comprising the filament and a cathode whereby the filament and the cathode operate in an arc discharge mode;
disconnecting the current to the filament; and
supplying RF power to a repeller and the cathode whereby the repeller and the cathode operate as a capacitively coupled plasma source.
12. The method of claim 11 , further comprising generating a plasma based on at least one of diborane, pentaborane, carborane, octadecaborane, decaborane, boron, arsenic, phosphorus, indium, germanium, and carbon.