Solid element device and method for manufacturing the same
View Patent ↗A method for manufacturing a solid element device, which comprises providing a glass-containing Al 2 O 3 substrate ( 3 ) having a GaN based LED element ( 2 ) placed thereon, setting a P 2 O 5 —ZnO based low melting point glass in parallel with the substrate, and carrying out a press working at a temperature of 415° C. or higher under a pressure of 60 kgf in a nitrogen atmosphere. Under these conditions, the low melting point glass has a viscosity of 10 9 poise, and is adhered via an oxide formed on the surface of the glass-containing Al 2 O 3 substrate ( 3 ). A solid element device manufactured by the above method can be manufactured through a glass sealing working at a low temperature and also has a highly reliable sealing structure.
1. A method of making a solid element device, said method comprising:
mounting a solid element on an electric power receiving and supplying part; and
pressing, by molds of a press, an inorganic sealing material directly onto said solid element at a temperature above a deformation point of said inorganic sealing material to seal said solid element,
wherein said solid element comprises a light emitting diode (LED).
2. The method of making a solid element device according to claim 1 , wherein said mounting is conducted by flip mounting.
3. The method of making a solid element device according to claim 1 , wherein said mounting comprises conducting wire bonding and covering said solid element and said wire bonding part by a heat resistant member that prevents said solid element and said wire bonding part from deformation.
4. The method of making a solid element device according to claim 1 , wherein said sealing is conducted such that said inorganic sealing material is processed in a viscosity state of more than 10 6 poise.
5. The method of making a solid element device according to claim 4 , wherein said sealing is conducted such that said inorganic sealing material is processed under high viscosity conditions in a range of 10 8 poise to 10 9 poise.
6. The method of making a solid element device according to claim 1 , wherein said electric power receiving and supplying part comprises an inorganic material substrate on a side of which said solid element is mounted and to a backside of which an electrode is formed led out, a plurality of solid elements being mounted on said inorganic material substrate and being sealed with said inorganic sealing material.
7. The method of making a solid element device according to claim 6 , wherein said inorganic sealing material comprises a preformed glass.
8. The method of making a solid element device according to claim 1 , wherein the sealing is conducted in an oxygen free atmosphere.
9. The method of making a solid element device according to claim 1 , wherein the sealing is conducted by hot pressing.
10. The method of making a solid element device according to claim 1 , wherein the inorganic sealing material comprises a glass sheet.
11. A method of making a solid element device, said method comprising:
mounting a solid element on an electric power receiving and supplying part;
pressing an inorganic sealing material onto said solid element at a temperature above a deformation point of said inorganic sealing material to seal said solid element; and
disposing a first sheet of the inorganic sealing material on the solid element and a second sheet of the inorganic sealing material under the solid element prior to said pressing,
wherein said pressing comprises:
placing an upper mold of a press to cover the first sheet;
placing a lower mold of the press to cover the second sheet; and
moving the upper mold and the lower mold of the press in a predetermined direction to apply pressure to the first sheet and the second sheet by said upper mold and said lower mold, respectively,
wherein said solid element comprises a light emitting diode (LED).
12. The method of making a solid element device according to claim 1 , wherein said pressing the inorganic sealing material onto said solid element comprises pressing an upper surface and a lower surface of the solid element by said molds of the press.
13. The method of making a solid element device according to claim 1 , wherein said inorganic sealing material is in direct contact with said solid element.
14. The method of making a solid element device according to claim 1 , further comprising:
disposing a first sheet of the inorganic sealing material on the solid element and a second sheet of the inorganic sealing material under the solid element prior to said pressing.
15. The method of making a solid element device according to claim 14 , wherein said molds of the press comprise an upper mold and a lower mold, said pressing comprising:
placing the upper mold of the press to cover the first sheet;
placing the lower mold of the press to cover the second sheet.
16. The method of making a solid element device according to claim 15 , wherein said pressing further comprises:
moving the upper mold and the lower mold of the press in a predetermined direction to apply pressure to the first sheet and the second sheet by said upper mold and said lower mold, respectively.
17. A method of making a solid element device, said method comprising:
flip-chip mounting a solid element on a ceramic substrate on a surface of which a circuit pattern is formed;
pressing an inorganic sealing material on said solid element at a temperature above a deformation point of said inorganic sealing material to seal said solid element; and
disposing a sheet of said inorganic sealing material on the solid element prior to said pressing,
wherein said pressing comprises:
placing an upper mold of a press to cover said sheet;
placing a lower mold of the press to cover the ceramic substrate; and
moving the upper mold and the lower mold of the press in a predetermined direction to apply pressure to the sheet and the ceramic substrate by said upper mold and said lower mold, respectively.
18. The method of making the solid element device according to claim 1 , wherein said electric power receiving and supplying part comprises an inorganic substrate formed in a plate shape.
19. The method of making the solid element device according to claim 1 , wherein said inorganic sealing material is selected from a group consisting of SiO 2 —Nb 2 O 5 -based, B 2 O 3 —F-based, P 2 O 5 —F-based, P 2 O 5 —ZnO-based, SiO 2 —B 2 O 3 —La 2 O 3 -based, and SiO 2 —B 2 O 3 -based glasses.
20. The method of making the solid element device according to claim 19 , wherein said inorganic sealing material comprises SiO 2 —Nb 2 O 5 -based or SiO 2 —B 2 O 3 -based glasses.
21. The method of making the solid element device according to claim 1 , wherein said inorganic sealing material has a side face formed by dicer cutting.
22. The method of making the solid element device according to claim 21 , wherein said solid element device has a rectangular shape having said side face of said inorganic sealing material.
23. The method of making the solid element device according to claim 1 , wherein said electric power receiving and supplying part has a heat dissipation pattern formed on a backside surface of said electric power receiving and supplying part.
24. The method of making the solid element device according to claim 23 , wherein a plurality of light emitting diode elements are mounted on said electric power receiving and supplying part.