IP Library Granted Patent US 7,828,982
Granted Patent B2
US 7,828,982 · App. 11/811,882 · Granted Nov 9, 2010

Adhesive microstructure and method of forming same

Assignee: The Regents of the University of California
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Quick Facts
Patent No.
US 7,828,982
App. No.
11/811,882
Granted
Nov 9, 2010
Kind
B2
Abstract

A method of forming an adhesive force includes removing a seta from a living specimen, attaching the seta to a substrate, and applying the seta to a surface so as to establish an adhesive force between the substrate and the surface. The seta is applied to the surface with a force perpendicular to the surface. The seta is then pulled with a force parallel to the surface so as to preload the adhesive force of the seta.

Claims (32)

1. A method of fabricating a microstructure, comprising:

obtaining a substrate;

forming a plurality of shafts, each shaft having a first end connected to the substrate and a second end opposite the first end, each shaft having a length of less than 500 microns, and each shaft having a diameter of between 0.01 and 0.1 times the length of the shaft; and

forming a protrusion at the second end of each shaft, each protrusion having a width of less than 10 microns, and each protrusion capable of providing a substantially parallel adhesive force at a surface of between about 20 and 8,000 nano-Newtons.

2. The method of claim 1 , where the plurality of shafts are formed using a sandwich of nitride and oxide.

3. The method of claim 1 , wherein forming a protrusion includes seeding the second end of each shaft to form the protrusion.

4. The method of claim 1 , wherein forming a protrusion includes roughening the second end of each shaft to form the protrusion.

5. The method of claim 1 , wherein forming a protrusion includes etching the second end of each shaft to form the protrusion.

6. The method of claim 1 , wherein forming a protrusion includes embossing the second end of each shaft to form the protrusion.

7. The method of claim 1 , wherein the plurality of shafts are formed using a sandwich of polymer layers.

8. The method of claim 7 , wherein the sandwich of polymer layers includes a spin-cast polymer material selected from the group consisting of photoresist, polyimide, glass, and epoxy-based compounds.

9. The method of claim 7 , wherein the sandwich of polymer layers includes a spray-deposited polymer material selected from the group consisting of photoresist, polyimide, glass, and epoxy-based compounds.

10. The method of claim 7 , wherein the sandwich of polymer layers includes ultra violet curable epoxies.

11. The method of claim 1 , wherein forming a plurality of shafts includes etching the substrate to form molding structures defining the length and shape of the plurality of shafts.

12. The method of claim 11 , further comprising:

coating the substrate with oxide and nitride layers.

13. The method of claim 11 , further comprising:

coating the substrate with a material selected from the group consisting of photoresist, polyimide, glass, and epoxy-based compounds.

14. A method of fabricating a microstructure, comprising:

obtaining a substrate;

forming a plurality of shafts, each shaft having a first end connected to the substrate and a second end opposite the first end, each shaft having a length of less than 500 microns, and each shaft having a diameter of between 0.01 and 0.1 times the length of the shaft; and

forming a plurality of protrusions at the second end of each shaft, each protrusion having a width of less than 10 microns, and each protrusion capable of providing a substantially parallel adhesive force at a surface of between about 20 and 8,000 nano-Newtons.

15. The method of claim 14 , wherein forming a protrusion includes seeding the second end of each shaft to form the protrusion.

16. The method of claim 14 , wherein forming a protrusion includes roughening the second end of each shaft to form the protrusion.

17. The method of claim 14 , wherein forming a protrusion includes etching the second end of each shaft to form the protrusion.

18. A method of fabricating a microstructure, comprising:

obtaining a substrate;

forming a plurality of shafts by etching the substrate to form molding structures defining the length and shape of the plurality of shafts, each shaft having a first end connected to the substrate and a second end opposite the first end, each shaft having a length of less than 500 microns, and each shaft having a diameter of between 0.01 and 0.1 times the length of the shaft; and

forming a plurality of protrusions at the second end of each shaft, each protrusion having a width of less than 10 microns.

19. The method of claim 18 , wherein forming a protrusion includes seeding the second end of each shaft to form the protrusion.

20. The method of claim 18 , wherein forming a protrusion includes roughening the second end of each shaft to form the protrusion.

21. The method of claim 18 , wherein forming a protrusion includes etching the second end of each shaft to form the protrusion.

Assignments (3)
CONFIRMATORY LICENSE Recorded Jan 7, 2015
From: THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 034728/0694 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 25, 2008
From: KENNY, THOMAS W.
To: THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY
Reel/Frame 020700/0083 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 25, 2008
From: FULL, ROBERT J.; FEARING, RONALD S.; AUTUMN, KELLAR
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 020700/0086 →
Continuity (4)
Continuation 1065527100 · Sep 3, 2003
Continuation 0964493600 · Aug 23, 2000
Provisional Application 6017273100 · Dec 20, 1999
Related Publication 20080073323A1 · Mar 27, 2008