Method for manufacturing reservoir capacitor of semiconductor device
A method for manufacturing a reservoir capacitor of a semiconductor device reduces the resistance of the reservoir capacitor to secure reliability of the semiconductor device. The method comprises: forming a dummy pattern having a lattice structure over a transistor; forming a first interlayer insulating film over the resulting structure including the dummy pattern; etching the first interlayer insulating film to form a line-structured storage node contact region between the lattice structures; and filling a conductive layer in the line-structured storage node contact region to form a line-structured storage node contact.
1. A method for manufacturing a reservoir capacitor of a semiconductor device, the method comprising:
forming a lattice-structured dummy pattern over a transistor;
forming a first interlayer insulating film over the dummy pattern;
etching the first interlayer insulating film between the lattice structures to form a line-structured storage node contact region; and
filling conductive material into the line-structured storage node contact region to form a line-structured storage node contact.
2. The method according to claim 1 , further comprising:
forming a second interlayer insulating film over the line-structured storage node contact; and
etching the second interlayer insulating film to form a hole-structured storage node contact which is electrically connected to the line-structured storage node contact.
3. The method according to claim 2 , wherein the forming-a-hole-structured-storage-node-contact includes:
etching the second interlayer insulating film so as to expose the line-structured storage node contact;
filling the conductive material into the hole-structured storage node contact region; and
performing an etch-back process on the conductive material to form the hole structured storage node contact region.
4. The method according to claim 1 , wherein the width of the lattice is formed to be substantially the same as or wider than that of a bit line formed in a cell region.
5. The method according to claim 1 , wherein the dummy pattern includes a metal layer.
6. The method according to claim 1 , wherein the line-structured storage node contact is connected to the lattice-structured dummy pattern.
7. The method according to claim 1 , the dummy pattern is formed spaced apart from the transistor by a given distance, so that the dummy pattern and the transistor are not in contact.