Semiconductor memory device and driving method thereof
This disclosure concerns a memory including a memory cell including a drain, a source and a floating body, wherein when a refresh operation is executed, a first current is carried from the drain or the source to the body and a second current is carried from the body to the second gate electrode by applying a first voltage and a second voltage to the first gate electrode and the second gate electrode, the first voltage and the second voltage being opposite in polarity to each other, and a state of the memory cell is covered to an stationary state in which an amount of the electric charges based on the first current flowing in one cycle of the refresh operation is almost equal to an amount of the electric charges based on the second current flowing in one cycle of the refresh operation.
1. A semiconductor memory device comprising:
a semiconductor layer;
a source layer and a drain layer provided in the semiconductor layer;
a body region provided on the semiconductor layer between the source layer and the drain layer, and accumulating electric charges or emitting the electric charges to store logic data;
a first gate dielectric film provided on a first surface of the body region;
a first gate electrode provide on the first surface of the body region via the first gate dielectric film;
a second gate dielectric film provided on a second surface of the body region, the second surface different from the first surface;
a second gate electrode provide on the second surface of the body region via the second gate dielectric film;
a driver driving the first gate electrode or the second gate electrode; and
a sense amplifier sensing the logic data from a memory cell including the source layer, the drain layer, and the body region, wherein
when a refresh operation for returning deteriorated logic data of the memory cell to original logic data is periodically executed, a first current is carried from the drain layer or the source layer to the body region and a second current is carried from the body region to the second gate electrode by respectively applying a first voltage and a second voltage to the first gate electrode and the second gate electrode, the first voltage and the second voltage being opposite in polarity to each other with respect to a potential of the source layer set as a reference potential, and a state of the memory cell is recovered to a stable stationary state in which an amount of the electric charges based on the first current flowing in one cycle of the refresh operation is almost equal to an amount of the electric charges based on the second current flowing in one cycle of the refresh operation.
2. The semiconductor memory device according to claim 1 , wherein
the amount of the electric charges based on the first current and the amount of the electric charges based on the second current balance to generate two stable stationary points and one unstable stationary point,
potentials of the body region corresponding to the two stable stationary points are present on both sides of a potential of the body region corresponding to the one unstable stationary point, and
one of the two stable stationary points corresponds to the stationary state of the memory cell storing data “0” and other of the two stable stationary points corresponds to the stationary state of the memory cell storing data “1”.
3. The semiconductor memory device according to claim 2 , wherein
in the refresh operation, a potential equal in polarity to the first gate electrode with respect to the potential of the source layer set as the reference potential is applied to the drain layer.
4. The semiconductor memory device according to claim 1 , wherein
in the refresh operation, a potential equal in polarity to the first gate electrode with respect to the potential of the source layer set as the reference potential is applied to the drain layer.
5. The semiconductor memory device according to claim 1 , wherein
when the refresh operation is executed, an impact ionization current is carried from the drain layer or the source layer to the body region and a tunnel current is carried from the body region to the second gate electrode by respectively applying the first and the second voltages to the first gate electrode and the second gate electrode.
6. The semiconductor memory device according to claim 5 , wherein
the first current and the second current in the refresh operation during an active mode, in which an operation for writing data from an outside or reading the data to the outside is executed, are respectively higher than the first current and the second current in the refresh operation during a data holding mode, in which the write and the read operations are not executed.
7. The semiconductor memory device according to claim 1 , wherein
the first current and the second current in the refresh operation during an active mode, in which an operation for writing data from an outside or reading the data to the outside is executed, are respectively higher than the first current and the second current in the refresh operation during a data holding mode, in which the write and the read operations are not executed.
8. The semiconductor memory device according to claim 1 , further comprising a bit line connected to the drain layer, wherein
the refresh operation is executed simultaneously on a plurality of memory cells connected to the same bit line.
9. The semiconductor memory device according to claim 1 , further comprising:
a local bit line connected to a drain of the memory cell;
a global bit line provided to correspond to a plurality of local bit lines and connected to the sense amplifier; and
a switching element provided between each of the local bit lines and the global bit line.
10. The semiconductor memory device according to claim 1 , wherein
the first gate dielectric film and the first gate electrode face one of side surfaces of the body region,
the second gate dielectric film and the second gate electrode face other of the side surfaces of the body region, and
the first gate dielectric film and the second gate dielectric film are equal in thickness.
11. A semiconductor memory device comprising:
a semiconductor layer;
a source layer and a drain layer provided in the semiconductor layer;
a body region provided on the semiconductor layer between the source layer and the drain layer, and accumulating electric charges or emitting the electric charges to store logic data;
a first gate dielectric film provided on a first surface of the body region;
a first gate electrode provide on the first surface of the body region via the first gate dielectric film;
a second gate dielectric film provided on a second surface of the body region, the second surface different from the first surface;
a second gate electrode provide on the second surface of the body region via the second gate dielectric film;
a driver driving the first gate electrode and the second gate electrode; and
a sense amplifier sensing the logic data from a memory cell including the source layer, the drain layer, and the body region, wherein
a potential of the second gate electrode is fixed to a certain potential so as to constantly carry a tunnel current from the body region to the second gate electrode, and
when a refresh operation for returning deteriorated logic data of the memory cell to original logic data is periodically executed, a first current is carried from the drain layer or the source layer to the body region by applying a first voltage to the first gate electrode, the first voltage being opposite in polarity to the potential of the second gate electrode with respect to a potential of the source layer set as a reference potential, and
when the refresh operation is periodically executed, a state of the memory cell is recovered to a stationary state in which an amount of the electric charges based on the first current flowing into the body region in one cycle of the refresh operation is almost equal to an amount of the electric charges based on the second current flowing into the second gate electrode from the body region in one cycle of the refresh operation.
12. The semiconductor memory device according to claim 11 , wherein
in the refresh operation, a potential equal in polarity to the first gate electrode with respect to the potential of the source layer set as the reference potential is applied to the drain layer.
13. The semiconductor memory device according to claim 11 , wherein
when the refresh operation is executed, an impact ionization current is carried from the drain layer or the source layer to the body region and a tunnel current is carried from the body region to the second gate electrode by respectively applying the first and the second voltages to the first gate electrode and the second gate electrode.
14. The semiconductor memory device according to claim 11 , wherein
the first current and the second current in the refresh operation during an active mode, in which an operation for writing data from an outside or reading the data to the outside is executed, are respectively higher than the first current and the second current in the refresh operation during a data holding mode, in which the write and the read operations are not executed.
15. The semiconductor memory device according to claim 11 , further comprising a bit line connected to the drain layer, wherein
the refresh operation is executed simultaneously on a plurality of memory cells connected to the same bit line.
16. The semiconductor memory device according to claim 11 , further comprising:
a local bit line connected to a drain of the memory cell;
a global bit line provided to correspond to a plurality of local bit lines and connected to the sense amplifier; and
a switching element provided between each of the local bit lines and the global bit line.