Vacuum pump damping adapter
The invention concerns a damping adapter ( 3 ) insertable in a suction duct between a service chamber ( 2 ) and a vacuum pump ( 1 ). The adapter ( 3 ) consists of a tubular duct wall ( 6 ) in the form of a flexible bellows surrounded by a damping sleeve ( 7 ) supported on two end flanges ( 4, 5 ). The flexible bellows' plys ( 6 a , 6 b ) receive a passive damping elastomer ( 8 a ) on their outer faces, engaged between the successive plys ( 6 a , 6 b ). This considerably reduces the transmitting of vibrations from the vacuum pump ( 1 ) to the service chamber ( 2 ), enabling applications in the microscopy field in particular.
1. A vacuum line damping adapter insertable in a suction duct between a service chamber and a vacuum pump, the adapter comprising a tubular duct wall in the form of a flexible bellows having ends and surrounded by a damping sleeve supported on both ends of the flexible bellows, in which the flexible bellows' plys receive, on their outer faces, a passive damping elastomer engaged between said plys,
wherein the dampening sleeve comprises a solid elastomer material which is spaced radially apart from apart from the flexible bellows at positions between said plys.
2. The damping adapter according to claim 1 , in which the passive damping elastomer engaged between the bellows' plys is joined to the damping sleeve.
3. The damping adapter according to claim 2 , in which the passive damping elastomer is of a piece with the damping sleeve.
4. The damping adapter according to claim 1 , further comprising at least one anti-rotation clevis are arranged on the outside of the bellows to withstand the relative rotation stresses between the vacuum pump and the process chamber.
5. The damping adapter according to claim 1 , in which the damping sleeve also includes an active vibration control device, which optimizes vibration damping.
6. The damping adapter according to claim 5 , in which the active vibration control device consists of a piezoelectric transverse film, engaged between one end of the damping sleeve and a vacuum pump connecting flange, and powered by a control device operating according to signals originating from an appropriate vibration sensor, a vacuum pump magnetic bearing control device, or a device powering the drive motor of the vacuum pump.
7. A vacuum line including a damping adapter according to claim 1 , inserted in a vacuum duct between a vacuum pump and a service chamber.
8. The vacuum line according to claim 7 , in which the vacuum pump is engaged at least in part inside the flexible bellows forming the tubular wall.
9. The damping adapter according to claim 4 , comprising diametrally opposed anti-rotation clevis arranged around the bellows.
10. The damping adapter according to claim 4 , wherein the clevis is fitted with elastomer bearing pads.
11. The damping adapter according to claim 9 , wherein the clevis is fitted with elastomer bearing pads.