Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent

1. A process for cleaning substrates comprising:

placing the substrates to be cleaned in a vessel;

adding organic solvent to the vessel;

cleaning the substrates with an organic solvent;

removing a portion of the organic solvent from the vessel;

adding pressurized fluid solvent to the vessel;

removing the pressurized fluid solvent from the vessel; and

removing the substrates from the vessel.

2. The process of claim 1 wherein the organic solvent is of the structural formula:

C a X j H k O z

wherein:

a=5n and 1≦n≦3;

each X is independently F, Cl, Br or I;

0≦z≦4;

0≦j, k≦10; and

0≦(j+k)≦10n.

3. The process of claim 1 wherein the organic solvent is of the structural formula:

C n X j H k

wherein:

1≦n≦20;

each X is independently F, Cl, Br or I;

0≦j;

k≦2n+2; and

2n−4≦(j+k)≦2n+2.

4. The process of claim 1 wherein the organic solvent is of the structural formula:

wherein:

R i ═O, S,

R iv ═C j H u X v ;

R ii ═C k H y X z or benzyl, phenyl, partially or fully fluorinated benzyl or phenyl;

0≦u, v≦2j+1;

0≦(u+v)≦2j+1;

0≦y, z≦2k+1;

0≦(y+z)≦2k+1;

0≦u, v, y, z≦37;

R 1-4 and R 9-12 are independently C m H n X p ,

where 0≦m≦2;

0≦(n+p)≦5; and

n+p=2m+1;

R 5-8 and R 13-16 are independently C a H b X d ,

wherein a is 0 or 1;

0≦(b+d)≦3; and

b+d=2a+1; and

each X is independently F, Cl, Br or I.

5. The process of claim 1 wherein the organic solvent is of the structural formula:

wherein:

R i ═O, S,

R iv ═C j H u X v ;

R ii ═C k H y X z or benzyl, phenyl, partially or fully fluorinated benzyl or phenyl;

j and k each equal 0 independently or

14−3(x+y+z)≦j, k≦22−3(x+y+z) and

14−3(x+y+z)≦(j+k)≦22−3(x+y+z);

0≦x, y, z≦1;

0≦(x+y+z)≦3;

0≦u, v, y, z≦37;

0≦(u+v)≦2j+1;

0≦(y+z)≦2k+1;

R 1-3 and R 7-9 are independently C m H n X p ,

wherein 0≦m≦2;

0≦(n+p)≦5; and

n+p=2m+1;

R 4-6 and R 10-12 are independently C a H b X d ,

wherein a is 0 or 1;

0≦(b+d)≦3; and

b+d=2a+1; and

each X is independently F, Cl, Br or I.

6. The process of claim 1 wherein the organic solvent is of the structural formula:

C n H j X k (OH) r

wherein:

each X is independently F, Cl, Br or I;

1≦n≦20;

0≦r≦4;

0≦j, k≦2n+2−r; and

2n−4−r≦(j+k)≦2n+2−r.

7. The process of claim 1 wherein the organic solvent is of the structural formula:

C n H j X k O b

wherein:

each X is independently F, Cl, Br or I;

2≦n≦20;

0≦j, k≦2n+2;

2n−4≦(j+k)≦2n+2; and

1≦b≦6.

8. The process of claim 1 wherein the organic solvent is of the structural formula:

wherein:

R i ═ester, S,

R v ═C j H u X v ;

R ii ═C k H a X b ;

15≦j, k≦32−3(w+x+y+z);

15≦j+k≦32−3(w+x+y+z);

0≦u, v≦2j+1;

0≦a;

b≦2k+1;

2j−7≦(u+v)≦2j+1;

2k−7≦(y+z)≦2k+1; and

R 1-4 and R 9-12 are independently C m H n X p ,

wherein 0≦m≦2;

0≦(n+p)≦5; and

n+p=2m+1;

R 5-8 and R 13-16 are independently C a H b X d ,

wherein a is 0 or 1;

0≦(b+d)≦3; and

b+d=2a+1; and

each X is independently F, Cl, Br or I.

9. The process of claim 1 wherein the organic solvent is of the structural formula:

wherein:

R i =ester, S,

R iv ═C j H u X v ;

R v ═C j H u X v ;

R ii ═C k H a X b ;

15≦j, k≦32−3(w+x+y+z);

15≦j+k≦32−3(w+x+y+z);

0≦u, v≦2j+1;

0≦a;

b≦2k+1;

2j−7≦(u+v)≦2j+1;

2k−7≦(y+z)≦2k+1; and

R 1-4 and R 9-12 are independently C m H n X p ,

wherein 0≦m≦2;

0≦(n+p)≦5; and

n+p=2m+1;

R 5-8 and R 13-16 are independently C a H b X d ,

wherein a is 0 or 1;

0≦(b+d)≦3; and

b+d=2a+1; and

each X is independently F, Cl, Br or I.

10. The process of claim 1 wherein the organic solvent is of the structural formula:

C n (CO 2 ) m H a X b

wherein:

each X is independently F, Cl, Br or I;

2≦n≦21;

1≦m≦3;

0≦a;

b≦2n+2; and

2n−2≦(a+b)≦2n+z.

11. The process of claim 1 wherein the organic solvent is of the structural formula:

C n (CO 3 ) m H a X b

wherein:

each X is independently F, Cl, Br or I;

2≦n≦18;

m=1;

0≦a;

b≦2n+2; and

2n−4≦(a+b)≦2n+z.

12. The process of claim 1 wherein the organic solvent is of the structural formula:

wherein:

R 1 ═C j H a X b

1≦j≦6

0≦a;

b≦2j+1; and

2j−7≦(a+b)≦2j+1;

R 2 ═C k H d X e

1≦k≦6;

0≦d;

e≦2k+1; and

d+e=2k+1;

R 3 ═C m H e X f

1≦m≦6;

0≦e;

f≦2 m+1; and

e+f=2m+1; and

each X is independently F, Cl, Br or I.

13. The process of claim 1 wherein the organic solvent is of the structural formula:

SO e C n H j X k

wherein:

each X is independently F, Cl, Br or I;

1≦e≦2;

2≦n≦8;

0≦j;

k≦2a+1; and

2n≦(j+k)≦2n+1

14. The process of claim 1 wherein the organic solvent is of the structural formula:

C n H y N a O b

wherein:

1≦n≦10;

1≦a;

b≦2 and a=b; and

2n−1≦y≦2n+1.

15. The process of claim 1 wherein the organic solvent is of the structural formula:

wherein:

each R equals C a X y H z independently;

each X is independently F, Cl, Br or I;

1≦a≦3; and

0≦y, z≦2a+1 and y+z=2a+1.

16. The process of claim 1 wherein the organic solvent is of the structural formula:

wherein:

2≦n≦4;

each R equals C a H y X z independently;

each X is independently F, Cl, Br or I;

1≦a≦3

0≦y;

z≦2a+1 and y+z=2a+1.

17. The process of claim 1 wherein the pressurized fluid solvent is densified carbon dioxide.

18. A system for cleaning substrates comprising:

a cleaning vessel adapted to hold contaminated substrates and organic solvent;

an organic solvent tank operatively connected to the cleaning vessel;

a pump for pumping organic solvent from the organic solvent tank to the cleaning vessel;

a drying vessel adapted to hold cleaned substrates and pressurized fluid solvent;

a pressurized fluid solvent tank operatively connected to the drying vessel; and

a pump for pumping pressurized fluid solvent from the pressurized fluid solvent tank to the drying vessel.

19. The system of claim 18 wherein the organic solvent is of the structural formula:

C a X j H k O z

wherein:

a=5n and 1≦n≦3;

each X is independently F, Cl, Br or I;

0≦z≦4;

0≦j, k≦10; and

0≦(j+k)≦10n.

20. The system of claim 18 wherein the organic solvent is of the structural formula:

C n X j H k

wherein:

1≦n≦20;

each X is independently F, Cl, Br or I;

0≦j;

k≦2n+2; and

2n−4≦(j+k)≦2n+2.

21. The system of claim 18 wherein the organic solvent is of the structural formula:

wherein:

R i ═O, S,

R iv ═C j H u X v ;

R ii ═C k H y X z or benzyl, phenyl, partially or fully fluorinated benzyl or phenyl;

0≦u, v≦2j+1;

0≦(u+v)≦2j+1;

0≦y, z≦2k+1;

0≦(y+z)≦2k+1;

0≦u, v, y, z≦37;

R 1-4 and R 9-12 are independently C m H n X p ,

where 0≦m≦2;

0≦(n+p)≦5; and

n+p=2m+1;

R 5-8 and R 13-16 are independently C a H b X d ,

wherein a is 0 or 1;

0≦(b+d)≦3; and

b+d=2a+1; and

each X is independently F, Cl, Br or I.

22. The system of claim 18 wherein the organic solvent is of the structural formula:

wherein:

R i ═O, S,

R iv ═C j H u X v ;

R ii ═C k H y X z or benzyl, phenyl, partially or fully fluorinated benzyl or phenyl;

j and k each equal 0 independently or

14−3(x+y+z)≦j, k≦22−3(x+y+z) and

14−3(x+y+z)≦(j+k)≦22−3(x+y+z);

0≦x, y, z≦1;

0≦(x+y+z)≦3;

0≦u, v, y, z≦37;

0≦(u+v)≦2j+1;

0≦(y+z)≦2k+1;

R 1-3 and R 7-9 are independently C m H n X p ,

wherein 0≦m≦2;

0≦(n+p)≦5; and

n+p=2m+1;

R 4-6 and R 10-12 are independently C a H b X d ,

wherein a is 0 or 1;

0≦(b+d)≦3; and

b+d=2a+1; and

each X is independently F, Cl, Br or I.

23. The system of claim 18 wherein the organic solvent is of the structural formula:

C n H j X k (OH) r

wherein:

each X is independently F, Cl, Br or I;

1≦n≦20;

0≦r≦4;

0≦j, k≦2n+2−r; and

2n−4−r≦(j+k)≦2n+2−r.

24. The system of claim 18 wherein the organic solvent is of the structural formula:

C n H j X k O b

wherein:

each X is independently F, Cl, Br or I;

2≦n≦20;

0≦j, k≦2n+2;

2n−4≦(j+k)≦2n+2; and

1≦b≦6.

25. The system of claim 18 wherein the organic solvent is of the structural formula:

wherein:

R i ═ester, S,

R v ═C j H u X v ;

R ii ═C k H a X b ;

15≦j, k≦32−3(w+x+y+z);

15≦j+k≦32−3(w+x+y+z);

0≦u, v≦2j+1;

0≦a;

b≦2k+1;

2j−7≦(u+v)≦2j+1;

2k−7≦(y+z)≦2k+1; and

R 1-4 and R 9-12 are independently C m H n X p ,

wherein 0≦m≦2;

0≦(n+p)≦5; and

n+p=2m+1;

R 5-8 and R 13-16 are independently C a H b X d ,

wherein a is 0 or 1;

0≦(b+d)≦3; and

b+d=2a+1; and

each X is independently F, Cl, Br or I.

26. The system of claim 18 wherein the organic solvent is of the structural formula:

wherein:

R i ═ester, S,

R iv ═C j H u X v ;

R v ═C j H u X v ;

R ii ═C k H a X b ;

15≦j, k≦32−3(w+x+y+z);

15≦j+k≦32−3(w+x+y+z);

0≦u, v≦2j+1;

0≦a;

b≦2k+1;

2j−7≦(u+v)≦2j+1;

2k−7≦(y+z)≦2k+1; and

R 1-4 and R 9-12 are independently C m H n X p ,

wherein 0≦m≦2;

0≦(n+p)≦5; and

n+p=2m+1;

R 5-8 and R 13-16 are independently C a H b X d ,

wherein a is 0 or 1;

0≦(b+d)≦3; and

b+d=2a+1; and

each X is independently F, Cl, Br or I.

27. The system of claim 18 wherein the organic solvent is of the structural formula:

C n (CO 2 ) m H a X b

wherein:

each X is independently F, Cl, Br or I;

2≦n≦21;

1≦m≦3;

0≦a;

b≦2n+2; and

2n−2≦(a+b)≦2n+z.

28. The system of claim 18 wherein the organic solvent is of the structural formula:

C n (CO 3 ) m H a X b

wherein:

each X is independently F, Cl, Br or I;

2≦n≦18;

m=1;

0≦a;

b≦2n+2; and

2n−4≦(a+b)≦2n+z.

29. The system of claim 18 wherein the organic solvent is of the structural formula:

wherein:

R 1 ═C j H a X b

1≦j≦6

0≦a;

b≦2j+1; and

2j−7≦(a+b)≦2j+1;

R 2 ═C k H d X e

1≦k≦6;

0≦d;

e≦2k+1; and

d+e=2k+1;

R 3 ═C m H e X f

1≦m≦6;

0≦e;

f≦2m+1; and

e+f=2m+1; and

each X is independently F, Cl, Br or I.

30. The system of claim 18 wherein the organic solvent is of the structural formula:

SO e C n H j X k

wherein:

each X is independently F, Cl, Br or I;

1≦e≦2;

2≦n≦8;

0≦j;

k≦2a+1; and

2n≦(j+k)≦2n+1.

31. The system of claim 18 wherein the organic solvent is of the structural formula:

C n H y N a O b

wherein:

1≦n≦10;

1≦a;

b≦2 and a=b; and

2n−1≦y≦2n+1.

32. The system of claim 18 wherein the organic solvent is of the structural formula:

wherein:

each R equals C a X y H z independently;

each X is independently F, Cl, Br or I;

1≦a≦3; and

0≦y, z≦2a+1 and y+z=2a+1.

33. The system of claim 18 wherein the organic solvent is of the structural formula:

wherein:

2≦n≦4;

each R equals C a H y X z independently;

each X is independently F, Cl, Br or I;

1≦a≦3

0≦y;

z≦2a+1 and y+z=2a+1.

34. The system of claim 18 wherein the pressurized fluid solvent is densified carbon dioxide.