Resonator having an output electrode underneath first and second electrode arms
A resonator that can alleviate restrictions in usage and design due to the bias voltage dependency and for which usage and design conditions can be easily determined, includes a movable electrode opposite and sandwiching the fixed electrode, and an extension of the fixed electrode or the movable electrode that extends along a plane crossing the opposite surfaces of the fixed electrode and the movable electrode. With being displaced vertically relative to the fixed electrode, the movable electrode is vibrated.
1. A resonator comprising:
a first electrode that has a first support portion and an arm extending horizontally from said first support portion;
a second electrode that has a second support portion and an arm extending horizontally toward said first electrode from said second support portion, wherein said arm of said first electrode and said arm of said second electrode are placed in parallel apart from each other; and
an output electrode placed underneath said arm of said first electrode and said arm of said second electrode and electrically connected to said first support portion of said first electrode,
wherein said second electrode further has a beam extending horizontally from said second support portion, and said arm of said second electrode is connected to said second support portion via said beam.
2. A resonator comprising:
a first electrode that has a first support portion and an arm extending horizontally from said first support portion;
a second electrode that has a second support portion and an arm extending horizontally toward said first electrode from said second support portion, wherein said arm of said first electrode and said arm of said second electrode are placed in parallel apart from each other; and
an output electrode placed underneath said arm of said first electrode and said arm of said second electrode and electrically connected to said first support portion of said first electrode,
wherein said output electrode is formed of a plurality of independent electrodes, only one of said plurality of independent electrodes is electrically connected to said first support portion, and voltages are selectively applied individually to other ones of said plurality of independent electrodes.
3. A resonator comprising:
a first electrode that has a first support portion and an arm extending horizontally from said first support portion;
a second electrode that has a second support portion and an arm extending horizontally toward said first electrode from said second support portion, wherein said arm of said first electrode and said arm of said second electrode are placed in parallel apart from each other;
an output electrode placed underneath said arm of said first electrode and said arm of said second electrode and electrically connected to said first support portion of said first electrode; and
a parallel plate electrode placed above said arm of said second electrode and connected to said arm of said second electrode.