Nozzle plate of inkjet printhead and method of manufacturing the nozzle plate
A nozzle plate of an inkjet printhead, and a method of manufacturing the nozzle plate. The nozzle plate includes a substrate through which nozzles are formed; an ink-philic coating layer formed on an outer surface of the substrate and inner walls of the nozzles; and an ink-phobic coating layer selectively formed on the ink-philic coating layer disposed around the nozzles.
1. A nozzle plate of an inkjet printhead, the nozzle plate comprising:
a substrate through which nozzles are formed;
a first ink-philic coating layer formed on an outer surface of the substrate and inner walls of the nozzles;
a second ink-philic coating layer formed to cover the first ink-philic coating layer formed on the outer surface of the substrate; and
an ink-phobic coating layer selectively formed only on the second ink-philic coating layer around the nozzles.
2. The nozzle plate of claim 1 , wherein the ink-phobic coating layer is formed to enclose the nozzles.
3. The nozzle plate of claim 1 , wherein the substrate is formed of silicon.
4. The nozzle plate of claim 1 , wherein the first ink-philic coating layer is formed of thermally oxidized silicon.
5. The nozzle plate of claim 1 , wherein the second ink-philic coating layer is formed of deposited silicon oxide.
6. The nozzle plate of claim 1 , wherein the surface of the second ink-philic coating layer has a root mean square (RMS) roughness of 0.5 to 2 nm.
7. The nozzle plate of claim 1 , wherein the ink-phobic coating layer is formed of perfluorinated silane or a fluorine polymer.