IP Library › Granted Patent US 7,893,495
Granted Patent B2
US 7,893,495 · App. 12/360,164 · Granted Feb 22, 2011

Thin film transistor

Assignee: Xerox Corporation
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Quick Facts
Patent No.
US 7,893,495
App. No.
12/360,164
Granted
Feb 22, 2011
Kind
B2
Abstract

A thin film transistor is disclosed comprising comprises a substrate, a dielectric layer, and a semiconductor layer. The semiconductor layer, which is crystalline zinc oxide preferentially oriented with the c-axis perpendicular to the plane of the dielectric layer or substrate, is prepared by liquid depositing a zinc oxide nanodisk composition. The thin film transistor has good mobility and on/off ratio.

Claims (19)

1. A thin film transistor, comprising:

a substrate;

a gate electrode a source electrode and a drain electrode;

a dielectric layer; and

a semiconductor layer;

wherein the semiconductor layer comprises zinc oxide nanodisks oriented with their c-axis perpendicular to the dielectric layer or the substrate; and

wherein the zinc oxide nanodisks have a height of from about 1 nanometer to about 100 nanometers.

2. A thin film transistor, comprising:

a substrate;

a gate electrode, a source electrode, and a drain electrode;

a dielectric layer; and

a semiconductor layer, wherein the semiconductor layer comprises zinc oxide nanodisks oriented with their c-axis perpendicular to the substrate;

wherein the zinc oxide nanodisks have a height of from about 1 nanometer to about 100 nanometers.

3. A thin film transistor, comprising:

a polymeric substrate;

a gate electrode, a source electrode, and a drain electrode;

a dielectric layer; and

a semiconductor layer, wherein the semiconductor layer comprises zinc oxide nanodisks oriented with their c-axis perpendicular to the dielectric layer;

wherein the zinc oxide nanodisks have a height of from about 1 nanometer to about 100 nanometers.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2025
From: XEROX CORPORATION
To: GENESEE VALLEY INNOVATIONS, LLC
Reel/Frame 073562/0677 →
Continuity (2)
Continuation 11546857 · Oct 12, 2006
Related Publication 20090127552A1 · May 21, 2009