Germanium substrate-type materials and approach therefor
View Patent ↗Germanium circuit-type structures are facilitated. In one example embodiment, a multi-step growth and anneal process is implemented to grow Germanium (Ge) containing material, such as heteroepitaxial-Germanium, on a substrate including Silicon (Si) or Silicon-containing material. In certain applications, defects are generally confined near a Silicon/Germanium interface, with defect threading to an upper surface of the Germanium containing material generally being inhibited. These approaches are applicable to a variety of devices including Germanium MOS capacitors, pMOSFETs and optoelectronic devices.
1. A method for growing Germanium, the method comprising:
growing a first Germanium layer on a Silicon-containing substrate;
annealing the first Germanium layer in the presence of Hydrogen to reduce a roughness of an interface between the Silicon-containing substrate and the first Germanium layer at least 50%;
growing a second Germanium layer on the first annealed Germanium layer; and
annealing the second Germanium layer in the presence of Hydrogen to cause the second Germanium layer to have a dislocation density of less than 1.5×10 6 cm −2 .
2. A method for manufacturing a semiconductor substrate, the method comprising:
forming a first layer comprising Germanium on a substrate;
annealing the first layer in an atmosphere comprising hydrogen to reduce a roughness of an interface between the Silicon-containing substrate and the first layer at least 50%;
forming a second layer comprising Germanium on the first layer; and
annealing the second layer in the presence of Hydrogen to cause the second layer to have a dislocation density of less than 1.5×10 6 cm −2 .
3. The method according to claim 2 , wherein the substrate is a silicon substrate.
4. The method according to claim 2 , wherein the first layer is a Germanium layer.
5. The method according to claim 2 , wherein the second layer is a Germanium layer.
6. The method according to claim 2 , further comprising forming a semiconductor device on the second layer.