Semiconductor module
View Patent ↗A semiconductor module 10 includes a ceramic substrate having a front surface on which a semiconductor element 12 is mounted and a rear surface on the opposite side of the front surface, a front metal plate 15 joined to the front surface, a rear metal plate 16 joined to the rear surface, and a heat sink 13 joined to the rear metal plate 16 . The rear metal plate 16 includes a joint surface 16 b that faces the heat sink 13 . The joint surface 16 b includes a joint area and a non-joint area. The non-joint area includes recesses 18 which extend in the thickness direction of the rear metal plate 16 . The joint area of the rear metal plate 16 is in a range from 65% to 85% of the total area of the joint surface 16 b on the rear metal plate 16 . As a result, excellent heat dissipating performance can be achieved while occurrence of distortion and cracking due to thermal stress is prevented.
1. A semiconductor module comprising:
a ceramic substrate having a front surface on which a semiconductor element is mounted and a rear surface on the opposite side of the front surface;
a front metal plate joined to the front surface;
a rear metal plate joined to the rear surface; and
a heat dissipating apparatus joined to the rear metal plate, wherein
the ceramic substrate includes aluminum nitride while the front metal plate and the rear metal plate include aluminum, and
the rear metal plate has a joint surface that faces the heat dissipating apparatus, wherein the joint surface includes a joint area and a non joint area, wherein the joint area is in a range from 65% to 85% of the total area of the joint surface, wherein the non joint area includes a hole or a trench formed in the joint surface and
the deepest portion of the hole or the trench in the joint surface is in fillet form.
2. The semiconductor module according to claim 1 , wherein the non-joint area is formed by carrying out an etching process on the rear metal plate.
3. The semiconductor module according to claim 1 , wherein the non-joint area is formed in such a manner that, in the case where the rear metal plate is divided into equal flat regions, the joint area is the same in all of the regions.
4. The semiconductor module according to claim 1 , wherein the front metal plate and the rear metal plate are made of pure aluminum.
5. The semiconductor module according to claim 1 wherein the ceramic substrate has a thickness of 0.1 mm to 1.1 mm, the front metal plate has a thickness of 0.1 mm to 1.1 mm, and the rear metal plate has a thickness of 0.1 mm to 1.1 mm.