Liquid discharging head and method for producing the liquid discharging head
A liquid discharging head includes a channel unit formed of a plurality of stacked plates having openings and a liquid channel formed of the openings of the stacked plates. A curing material is filled in a step formed due to shift of the openings provided in the adjacent plates respectively, and the curing material forms part of an inner surface of the liquid channel. Consequently, the channel inner surface becomes smooth, and a liquid discharging head with little residual bubbles and with excellent bubble discharging capability is provided. Further, the attenuation of a pressure wave due to the step can be prevented.
1. A method for producing a liquid discharging head which discharges a liquid from a nozzle of a channel unit formed by stacking a plurality of plates each of which has openings, the method comprising:
a first step for bonding the plates by metal diffusion bonding and making the openings of the plates communicate with one another to form a liquid channel;
a second step for introducing a curing material in a liquid form or a mist form throughout the liquid channel; and
a third step for introducing a fluid to the liquid channel until the curing material is dried.
2. The method for producing the liquid discharging head according to claim 1 , wherein the openings are formed by half etching.
3. The method for producing the liquid discharging head according to claim 1 , wherein the curing material is a thermosetting adhesive, and the fluid is a high-temperature air.
4. The method for producing the liquid discharging head according to claim 3 , wherein a temperature of the high-temperature air is about 70° C. to about 150° C.
5. The method for producing the liquid discharging head according to claim 1 , wherein the plates include a nozzle plate stacked on an outermost side of the channel unit;
other plates among the plurality of plates which are different from the nozzle plate are bonded to form a stack in the first step;
and the method further comprising, after the third step, a fourth step for bonding the nozzle plate to the stack.
6. The method for producing the liquid discharging head according to claim 5 , wherein in the fourth step, the nozzle plate is bonded to the stack by an adhesive.
7. The method for producing the liquid discharging head according to claim 1 , wherein the first step further includes forming a piezoelectric layer by an aerosol deposition method after forming the liquid channel.
8. The method for producing the liquid discharging head according to claim 7 , wherein the first step further includes forming a plurality of individual surface electrodes on the piezoelectric layer.