Crystal devices and methods for manufacturing same
Crystal devices are disclosed that include a crystal frame having a crystal vibrating piece and an outer frame. The crystal vibrating piece includes excitation electrodes, and the outer frame supports the crystal vibrating piece. Each device has a base including connection electrodes on a first surface thereof and respective external electrodes on a second surface thereof, wherein the connection electrodes are electrically connected via respective through-holes to respective excitation electrodes and to respective external electrodes. The first surface of the base is bonded to the under-surface of the outer frame, and an upper surface of the outer frame is bonded to a crystal lid. The through-holes have non-circular transverse profiles and are filled with a sealing material such as a metal.
1. A crystal device, comprising:
a crystal frame comprising an outer frame and a crystal vibrating piece, the outer frame having a first surface and an opposing second surface, the crystal vibrating piece being coupled to and supported by the outer frame, and the crystal vibrating piece including excitation electrodes;
a crystal base having a first surface and an opposing second surface, the first surface of the base being bonded to the second surface of the outer frame and including connection electrodes electrically connected to the excitation electrodes of the crystal vibrating piece, the connection electrodes also being electrically connected to respective external electrodes formed on the second surface of the base; and
a crystal lid bonded to the first surface of the crystal frame;
wherein the base defines respective through-holes that are electrically connected to respective connection electrodes and to respective external electrodes, the through-holes have at least one non-circular transverse profile, are filled with a sealing material, and have polygonal transverse profiles on the first and second surfaces of the crystal base, the polygonal transverse profile of the first surface of the base being different from the polygonal transverse profile of the second surface of the base.
2. The crystal device of claim 1 , wherein the polygonal transverse profile of the through-holes at the first surface of the base has a different size from the polygonal transverse profile of the through-holes at the second surface of the base.
3. The crystal device of claim 1 , wherein the at least one polygonal profile includes a star-shaped profile.
4. The crystal device of claim 1 , wherein the at least one polygonal profile includes multiple projections extending inwardly.
5. The crystal device of claim 1 , wherein the at least one polygonal profile includes multiple projections extending outwardly.
6. The crystal device of claim 1 , wherein the crystal lid, crystal frame, and crystal base are bonded to each other by siloxane bonding.
7. The crystal device of claim 6 , wherein:
the crystal lid has a first concavity;
the crystal base has a second concavity; and
the crystal vibrating piece is situated between the first concavity and the second concavity.
8. The crystal device of claim 1 , wherein:
the through-holes and the connection electrodes each comprise a first metal layer and a second metal layer formed on the first metal layer; and
the sealing material in the through-holes is a metal.
9. The crystal device of claim 1 , wherein:
the polygonal transverse profile of the first surface of the base is hexagonally shaped; and
the polygonal transverse profile of the second surface of the base is triangularly shaped.
10. The crystal device of claim 3 , wherein:
the polygonal transverse profile of the first surface of the base is pentagonally shaped; and
the polygonal transverse profile of the second surface of the base is triangularly shaped.