Contact probe pin
View Patent ↗The present invention provides a contact probe pin having both electrical conductivity and durability and being capable of realizing low adhesion to the device under test (particularly, tin contained therein) and thereby stably maintaining electrical contact over a long period of time. The present invention relates to a contact probe pin comprising: a base material; and a carbon film comprising at least one of a metal and a carbide thereof, wherein the carbon film is continuously formed over the surface of from a tip part of the contact probe pin to a lateral part of the contact probe pin, and a content of the at least one of a metal and a carbide thereof in the carbon film is continuously or intermittently decreased from the tip part toward the lateral part.
1. A contact probe pin comprising: a base material; and a carbon film comprising at least one of a metal and a carbide thereof,
wherein the carbon film is continuously formed over the surface of from a tip part of the contact probe pin to a lateral part of the contact probe pin, and a content of the at least one of a metal and a carbide thereof in the carbon film is continuously or intermittently decreased from the tip part toward the lateral part.
2. The contact probe pin according to claim 1 , wherein assuming that a content of the at least one of a metal and a carbide thereof in the carbon film of the tip part is A (atomic %) and a maximum content of the at least one of a metal and a carbide thereof in the carbon film of a portion of the lateral part, the portion being not in contact with a device under test, is B (atomic %), the ratio B/A is 0.9 or less.
3. The contact probe pin according to claim 1 , wherein assuming that a content of the at least one of a metal and a carbide thereof in the carbon film of the tip part is A (atomic %) and a content of the at least one of a metal and a carbide thereof in the carbon film of the lateral part at a position of 10 μm on a basal side from the tip part is B′ (atomic %), the ratio B′/A is 0.9 or less.
4. The contact probe pin according to claim 1 , wherein a content of the at least one of a metal and a carbide thereof in the carbon film of the tip part is from 5 to 30 atomic %.
5. The contact probe pin according to claim 1 , wherein the metal is one or more metals selected from the group consisting of tungsten, tantalum, molybdenum, niobium, titanium and chromium.
6. The contact probe pin according to claim 1 , wherein the device tested by the contact probe pin comprises tin or a tin alloy.