Capacitor built-in substrate and method of manufacturing the same and electronic component device
A capacitor built-in substrate of the present invention includes; a base resin layer; a plurality of capacitors arranged side by side in a lateral direction in a state that the capacitors are passed through the base resin layer, each of the capacitors constructed by a first electrode provided to pass through the base resin layer and having projection portions projected from both surface sides of the base resin layer respectively such that the projection portion on one surface side of the base resin layer serves as a connection portion, a dielectric layer for covering the projection portion of the first electrode on other surface side of the base resin layer, and a second electrode for covering the dielectric layer; a through electrode provided to pass through the base resin layer and having projection portions projected from both surface sides of the base resin layer respectively; and a built-up wiring formed on the other surface side of the base resin layer and connected to the second electrodes of the capacitors and one end side of the through electrode.
1. A capacitor built-in substrate, comprising:
a base resin layer having an opening portion which passes through to a thickness direction;
a capacitor first electrode filled in a whole of the opening portion and having a first projection portion projected to a lower side from the opening portion and a second projection portion projected to an upper side from the opening portion,
wherein the first projection portion serves as a connection portion and an end and a side of the first projection portion are exposed, and the second projection portion has a hemispherical shape;
a capacitor dielectric layer covering a surface of the hemispherical shape of the second projection portion of the capacitor first electrode and
a capacitor second electrode covering the dielectric layer;
wherein the capacitor is constructed by the capacitor first electrode, the dielectric layer, and the capacitor second electrode, and is arranged from the opening portion of the base resin layer onto the opening portion,
and a plurality of capacitors are arranged in a lateral direction in a state that the capacitors are passed through the base resin layer, wherein an intermediate resin layer is formed between at least two of said plurality of capacitors,
a through electrode provided to pass through the base resin layer and having projection portions projected from both surface sides of the base resin layer respectively; and
a built-up wiring formed on the base resin layer and connected to the capacitor second electrodes and one end side of the through electrode.
2. A capacitor built-in substrate according to claim 1 , further comprising:
a resistor portion constructed by
a first electrode provided to pass through the base resin layer and having projection portions projected from both surface sides of the base resin layer respectively, whereby the projection portion on one surface side of the base resin layer serves as a connection portion;
an insulating layer for covering the first electrode on other surface side of the base resin layer; and
a second electrode for covering the insulating layer;
wherein the second electrode of the resistor portion is connected to the built-up wiring.
3. An electronic component device, comprising:
the capacitor built-in substrate set forth in any one of claims 1 and 2 ; and
a semiconductor chip mounted to be connected to the connection portion of the capacitor first electrode and other end side of the through electrode.