Manufacturing methods of thin film solar cell and thin film solar cell module
A manufacturing method of a thin film solar cell comprises performing dry cleaning of an insulation substrate on which a transparent electrode is formed, patterning the transparent electrodes to be spaced apart from each other, performing dry cleaning of the patterned transparent electrodes, forming a semiconductor layer on surfaces of the transparent electrodes and patterning a metal electrode on the semiconductor layer.
1. A manufacturing method of a thin film solar cell comprising the steps of:
performing dry cleaning of an insulation substrate on which a transparent electrode is formed;
patterning the transparent electrodes to be spaced apart from each other;
performing dry cleaning of the patterned transparent electrodes;
forming a semiconductor layer on surfaces of the transparent electrodes; and
patterning a metal electrode on the semiconductor layer.
2. The manufacturing method according to claim 1 , wherein the step of performing the dry cleaning of the insulation substrate includes:
removing an organic material; and
removing particles.
3. The manufacturing method according to claim 2 , wherein ozone is used when the organic material is removed, and the ozone is produced using one of atmosphere pressure plasma, a ultra-violet lamp, or a combination of the atmosphere pressure plasma and the ultra-violet lamp.
4. The manufacturing method according to claim 2 , wherein the step of removing the particles includes:
floating particles on the insulation substrate using cooling dried air; and
sucking the particles.
5. The manufacturing method according to claim 2 , wherein the step of performing the dry cleaning of the patterned transparent electrodes includes:
floating particles on the patterned transparent electrodes; and
sucking the floated particles in a circumference.
6. The manufacturing method according to claim 1 , further comprising performing a dry cleaning of the patterned metal electrode.
7. The manufacturing method according to claim 6 , wherein the step of performing the dry cleaning of the patterned metal electrode includes:
floating particles on the metal electrode; and
sucking the floated particles.
8. The manufacturing method according to claim 2 , wherein the organic material is removed by ozone after removal of the particles.
9. The manufacturing method according to claim 1 , wherein nitrogen gas in plasma atmosphere is used in the step of performing the dry cleaning of the patterned transparent electrode.
10. A manufacturing method of a thin film solar cell module comprising the steps of:
performing dry cleaning of an insulation transparent substrate on which a transparent electrode is formed;
patterning the transparent electrodes to be spaced apart from each other;
performing dry cleaning of the patterned transparent electrodes;
forming a semiconductor layer on surfaces of the transparent electrodes;
patterning a metal electrode on the semiconductor layer;
performing an edge exclusion of removing the transparent electrodes, the semiconductor layer, and the metal electrode on edge regions of the insulation substrate to a predetermined width; and
performing a dry cleaning procedure after the edge exclusion step.
11. The manufacturing method according to claim 10 , wherein the step of dry cleaning the insulation substrate includes:
removing an organic material; and
removing particles.
12. The manufacturing method according to claim 11 , wherein ozone is used when the organic material is removed, and the ozone is produced using one of atmosphere pressure plasma, a ultra-violet lamp, or a combination of the atmosphere pressure plasma and the ultra-violet lamp.
13. The manufacturing method according to claim 11 , wherein the step of removing the particles includes:
floating particles on the insulation substrate using cooling dried air; and
sucking the particles.
14. The manufacturing method according to claim 11 , wherein the dry cleaning step after the edge exclusion step includes:
floating particles on the patterned transparent electrodes; and
sucking the floated particles in a circumference.
15. The manufacturing method according to claim 10 , further comprising performing dry cleaning of the patterned metal electrode.
16. The manufacturing method according to claim 15 , wherein the step of dry cleaning the patterned metal electrode includes:
floating particles on the metal electrode; and
sucking the floated particles.