Method for surface modification

1. A method for surface modification comprising the steps of:

emitting light from a pulse laser light source;

diffracting the light utilizing a diffractive element including a diffractive beam splitter to generate beams including two pairs of plus and minus first-order light and a zeroth-order light;

converging the beams utilizing a collimator lens;

removing the zeroth-order light from the beams to include four beams;

focusing the four beams on a material utilizing a capacitor lens at a point where the plus and minus first-order light of the two pairs intersect; and

irradiating a material with the four beams of ultrashort pulse laser light to form a modified region including an amorphous region or a strain region on a surface of the material utilizing interference exposure.

2. A method for surface modification according to claim 1 , wherein

the ultrashort pulse laser light has a pulse width of 1 femtosecond to 10 picoseconds.

3. A method for surface modification according to claim 1 ,

wherein the pairs of beams are parallel to each other when interference exposure is performed.

4. A method for surface modification according to claim 1 , wherein

the pulse laser light source has a pulse width of 250 femtoseconds to 10 picoseconds in response to a refractive index of the material being greater than 2.

5. A method for surface modification according to claim 1 , further comprising the step of:

annealing the material to relax at least a strain in the strain region after the step of irradiating the material with the ultrashort pulse laser light.

6. A method for surface modification according to claim 1 , wherein

the ultrashort pulse laser light has energy equal to or lower than an ablation threshold of the material.

7. A method for surface modification according to claim 6 , further comprising the step of:

forming a refractive index distribution structure including the amorphous region or the strain region on a portion of the material as a semiconductor material.

8. A method for surface modification according to claim 1 , wherein

the ultrashort pulse laser light has a wavelength in a range in which a two-photon absorption process or one-photon absorption process may occur corresponding to an absorption edge of the material.

9. A method for surface modification according to claim 1 , wherein the material is a GaN substrate, wherein the light is a wavelength of 400 nm, and a highest output pulse energy is 350μJ.

10. A method for surface modification according to claim 1 , wherein the amorphous region is formed under an ablation portion, the strain region is also formed under the amorphous region.

11. A method for surface modification according to claim 1 , wherein both the strain region and the amorphous region are formed and the amorphous region is removed by chemical etching or physical etching.

12. A method for surface modification according to claim 1 , wherein the wherein a focal length of the collimator lens and a distance between the collimator lens and the diffractive element is equal.

13. A method for surface modification according to claim 1 , wherein the modified region is a three-dimensional periodic structure formed by interference exposure with the ultrashort pulse laser light including five beams, the five beams including plus and minus first-order light with a beam of zeroth-order light.

14. A method for surface modification comprising the steps of:

emitting light from a pulse laser light source;

diffracting the light utilizing a diffractive element including a diffractive beam splitter to generate beams including two pairs of plus and minus first-order light and a zeroth-order light;

converging the beams utilizing a collimator lens;

focusing the beams on a material utilizing a capacitor lens at a point where the plus and minus first-order light of the two pairs intersect;

irradiating a semiconductor material with ultrashort pulse laser light of the beams to form a three-dimensional structure of a modified region, the modified region including 1) an amorphous region, 2) a strain region, 3) or the amorphous region and the strain region within the semiconductor material.

15. The method for surface modification of claim 14 , wherein the semiconductor material is a GaN substrate, wherein the surface modification is performed utilizing interference exposure.

16. The method for surface modification of claim 14 , wherein the irradiating is performed using sweep irradiation by placing the substrate material on a two-dimensional stage or a three-dimensional stage.

17. The method for surface modification of claim 15 , wherein the modified region is formed utilizing one-shot pulse irradiation.

18. The method for surface modification of claim 15 , wherein the amorphous region is formed under an ablation portion, the strain region is also formed under the amorphous region.