Semiconductor substrate cleaning methods, and methods of manufacture using same
In a cleaning composition, a method of cleaning a semiconductor substrate and a method of manufacturing a semiconductor device, the cleaning composition includes about 0.5 to about 5% by weight of an organic ammonium hydroxide compound, about 0.1 to about 3% by weight of a fluoride compound, about 0.1 to about 3% by weight of a buffering agent, about 0.5 to about 5% by weight of an etching accelerant, and a remainder of water.
1. A method of cleaning a semiconductor substrate, comprising:
preparing a cleaning composition to include about 0.5 to about 5% by weight of an organic ammonium hydroxide compound, about 0.1 to about 3% by weight of a fluoride compound, about 0.1 to about 3% by weight of a buffering agent, about 0.5 to about 5% by weight of an etching accelerant, and a remainder of water; and thereafter,
applying the cleaning composition to a semiconductor substrate having a conductive element previously formed thereon using a single-wafer cleaning process, wherein the cleaning composition is applied as the semiconductor substrate rotates at a speed of about 1,000 to about 2,000 rpm.
2. The method of claim 1 , wherein the cleaning composition is applied using the single-wafer cleaning apparatus for about 30 to about 90 seconds.
3. The method of claim 1 , wherein the cleaning composition further comprises a surfactant in an amount ranging from about 5 ppm to about 100 ppm.
4. A method of manufacturing a semiconductor device, comprising:
forming a conductive element from a metal material on a substrate; and thereafter,
removing residual impurities from the substrate and the conductive element using a single-wafer cleaning process and a cleaning composition that comprises about 0.5 to about 5% by weight of an organic ammonium hydroxide compound, about 0.1 to about 3% by weight of a fluoride compound, about 0.1 to about 3% by weight of a buffering agent, wherein the buffering agent comprises at least one of ammonium nitrate and ammonium iodate, about 0.5 to about 5% by weight of an etching accelerant, and a remainder of water, the impurities being generated while the conductive element is formed on the substrate.
5. The method of claim 4 , wherein the conductive element comprises at least one of a gate electrode, a bit line, a pad, a contact, and a metal wiring.
6. The method of claim 4 , further comprising:
rinsing the substrate after removing the residual impurities; and thereafter, drying the substrate.
7. The method of claim 4 , wherein the cleaning composition further comprises a surfactant in an amount ranging from about 5 ppm to about 100 ppm.
8. The method of claim 4 , wherein the etching accelerant comprises ammonium fluoride (NH 4 F).
9. The method of claim 4 , wherein the cleaning composition has a pH in a range of about 3.5 to about 4.5.
10. The method of claim 1 , wherein the etching accelerant comprises at least one selected from the group consisting of ammonium fluoride (NH 4 F), ammonium bromide (NH 4 Br) and ammonium sulfate ((NH 4 ) 2 SO 4 ).
11. The method of claim 10 , wherein the etching accelerant comprises ammonium fluoride (NH 4 F).
12. The method of claim 1 , wherein the organic ammonium hydroxide compound comprises at least one selected from the group consisting of tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, benzyltriethylammonium hydroxide, diethyldimethylammonium hydroxide, hexadecyltrimethylammonium hydroxide, and methyltributylammonium hydroxide.
13. The method of claim 1 , wherein the fluoride compound comprises at least one selected from the group consisting of hydrogen fluoride, tetramethylammonium fluoride, tetraethylammonium fluoride, tetrapropylammonium fluoride, tetrabutylammonium fluoride, fluoroboric acid, tetramethylammonium tetrafluoroborate, tetraethylammonium tetrafluoroborate, tetrapropylammonium tetrafluoroborate, and tetrabutylammonium tetrafluoroborate.
14. A method of cleaning a semiconductor substrate, comprising:
preparing a cleaning composition to include about 0.5 to about 5% by weight of an organic ammonium hydroxide compound, about 0.1 to about 3% by weight of a fluoride compound, about 0.1 to about 3% by weight of a buffering agent, wherein the buffering agent comprises at least one of ammonium nitrate and ammonium iodate, about 0.5 to about 5% by weight of an etching accelerant, and a remainder of water; and thereafter,
applying the cleaning composition to a semiconductor substrate having a conductive element previously formed thereon using a single-wafer cleaning process.
15. The method of claim 14 , wherein the cleaning composition comprises:
about 0.5 to about 3% by weight of the organic ammonium hydroxide compound;
about 0.1 to about 1% by weight of the fluoride compound;
about 0.4 to about 1.5% by weight of the buffering agent;
about 0.5 to about 2% by weight of the etching accelerant;
about 5 to about 50 ppm of a non-ionic surfactant; and
a remainder of water.
16. The method of claim 14 , wherein the cleaning composition has a pH in a range of about 2.0 to about 4.5.
17. The method of claim 14 , wherein the cleaning composition has a pH in a range of about 3.5 to about 4.5.
18. The method of claim 14 , wherein the cleaning composition is applied using the single-wafer cleaning apparatus for about 30 to about 90 seconds.
19. The method of claim 14 , wherein the cleaning composition further comprises a surfactant in an amount ranging from about 5 ppm to about 100 ppm.
20. The method of claim 14 , wherein the etching accelerant comprises ammonium fluoride (NH 4 F).