Process for producing organiclight-emitting display device
A position displacement between a substrate and a mask which is caused when the substrate and the mask are brought into close contact with each other is suppressed by a magnetic force. In a step of forming an organic compound layer (organic EL element film) included in an organic light-emitting display device on the substrate ( 2 ) through the mask ( 3 ) by vapor deposition, the substrate ( 2 ) is aligned with the mask ( 3 ) and then the substrate ( 2 ) is pressed to the mask ( 3 ) by a plurality of pressing members ( 5 ) to perform temporary fixation. While the position displacement between the substrate ( 2 ) and the mask ( 3 ) is suppressed by the temporary fixation, the substrate ( 2 ) is brought into close contact with the mask ( 3 ) by magnets ( 6 ). A plurality of positions of the substrate ( 2 ) which has aligned are temporarily fixed by the plurality of pressing members ( 5 ), respectively, so that high-precision patterning can be performed to prevent a deviation of the organic EL element film from an anode.
1. A process for producing an organic light-emitting display device having at least one organic compound layer on an electrode provided on a substrate, comprising the steps of:
aligning the substrate with a mask by an alignment mechanism;
pressing the aligned substrate against the mask from a central part toward a periphery of the substrate by a pressing member to temporarily fix the substrate to the mask;
closely fixing the substrate and the mask which are temporarily fixed by the pressing member by a magnetization unit; and
forming an organic compound layer on the substrate through the closely fixed mask by vapor deposition,
wherein the substrate is temporarily fixed to the mask at a plurality of positions by a plurality of pressing members, respectively, and
wherein when the substrate is temporarily fixed to the mask, pressing times or pressing strengths of the plurality of pressing members are different on a surface of the substrate.
2. An apparatus for producing an organic light-emitting display device having at least one organic compound layer on an electrode provided on a substrate, comprising:
an alignment mechanism for aligning the substrate with a mask;
a plurality of pressing members for pressing a plurality of positions of the substrate against the mask from a central part toward a periphery of the substrate to temporarily fix the substrate to the mask;
a magnetization unit for closely fixing the substrate to the mask by a magnetic force; and
a vapor deposition source for forming the organic compound layer on the substrate through the mask by vapor deposition,
wherein the magnetization unit comprises a mechanism for cooling the substrate.
3. A process for producing an organic light-emitting display device having at least one organic compound layer on an electrode provided on a substrate, comprising the steps of:
aligning the substrate with a mask by an alignment mechanism;
pressing the aligned substrate against the mask from a central part toward a periphery of the substrate by a pressing member to temporarily fix the substrate to the mask; and
forming an organic compound layer on the substrate through the fixed mask by vapor deposition,
wherein the substrate is temporarily fixed to the mask at a plurality of positions by a plurality of pressing members, respectively, and
wherein when the substrate is temporarily fixed to the mask, pressing times or pressing strengths of the plurality of pressing members are different on a surface of the substrate.