Dicing tape laminated with adhesive sheet of polymer, thermosetting resin and filler
The invention provides an adhesive sheet which can be stuck to a wafer at low temperatures of 100° C. or below, which is soft to the extent that it can be handled at room temperature, and which can be cut simultaneously with a wafer under usual cutting conditions; a dicing tape integrated type adhesive sheet formed by lamination of the adhesive sheet and a dicing tape; and a method of producing a semiconductor device using them. In order to achieve this object, the invention is characterized by specifying the breaking strength, breaking elongation, and elastic modulus of the adhesive sheet in particular numerical ranges.
1. A dicing tape integrated adhesive sheet formed by lamination of an adhesive sheet and a dicing tape, wherein the adhesive sheet comprises an epoxy group-containing (meth)acrylic copolymer, a thermosetting component, and a filler, and wherein the filler is included in an amount of 35 to 60% by weight based on a total weight of the adhesive sheet; the breaking strength of the adhesive sheet in a B-stage state is from 0.1 to 10 MPa at 25° C.; and the breaking elongation of the adhesive sheet is from 1 to 40% at 25°.
2. The dicing tape integrated adhesive sheet according to claim 1 , wherein the thermosetting component comprises an epoxy resin.
3. A dicing tape integrated adhesive sheet formed by lamination of an adhesive sheet and a dicing tape, wherein the adhesive sheet comprises an epoxy group-containing (meth)acrylic copolymer, a thermosetting component, and a filler, and wherein the filler is included in an amount of 35 to 60% by weight based on a total weight of the adhesive sheet; the elastic modulus of the adhesive sheet in a B-stage state is from 1 to 3000 MPa in measurement of the dynamic viscoelasticity at 25° C. and 10 Hz; and the elastic modulus of the adhesive sheet is from 4000 to 20000 MPa in measurement of the dynamic viscoelasticity at 25° C. and 900 Hz.
4. The dicing tape integrated adhesive sheet according to claim 3 , wherein the thermosetting component comprises an epoxy resin.
5. A dicing tape integrated adhesive sheet formed by lamination of an adhesive sheet and a dicing tape, wherein the adhesive sheet comprises an epoxy group-containing (meth)acrylic copolymer, a thermosetting component, and a filler, and wherein the filler is included in an amount of 35 to 60% by weight based on a total weight of the adhesive sheet; the elastic modulus of the adhesive sheet in a B-stage state is from 1 to 3000 MPa in measurement of the dynamic viscoelasticity at 25° C. and 10 Hz; and the elastic modulus of the adhesive sheet is from 4000 to 20000 MPa in measurement of the dynamic viscoelasticity at −20° C. and 10 Hz.
6. The dicing tape integrated adhesive sheet according to claim 1 , wherein said breaking strength is from 1 to 8 MPa at 25° C. and said breaking elongation is from 1 to 40% at 25° C.
7. The dicing tape integrated adhesive sheet according to claim 3 , wherein said elastic modulus of the adhesive sheet in the B-stage state is 10 to 1500 MPa at 25° C. and 10 Hz, and said elastic modulus of the adhesive sheet is 5000 to 15000 MPa at 25° C. and 900 Hz.
8. The dicing tape integrated adhesive sheet according to claim 1 , wherein said dicing tape has a substrate of polyvinyl chloride or a polyolefin.
9. The dicing tape integrated adhesive sheet according to claim 3 , wherein said dicing tape has a substrate of polyvinyl chloride or a polyolefin.
10. The dicing tape integrated adhesive sheet according to claim 5 , wherein said dicing tape has a substrate of polyvinyl chloride or a polyolefin.
11. The dicing tape integrated adhesive sheet according to claim 1 , wherein said epoxy group-containing (meth)acrylic copolymer comprises an acrylic rubber.
12. The dicing tape integrated adhesive sheet according to claim 1 , wherein said epoxy group-containing (meth)acrylic copolymer is included in an amount of 50% or less of a total weight of the adhesive sheet from which the weight of the filler has been removed.
13. The dicing tape integrated adhesive sheet according to claim 12 , wherein said amount of said epoxy group-containing (meth)acrylic copolymer is 25% to 35% of the total weight of the adhesive sheet from which the weight of the filler has been removed.
14. The dicing tape integrated adhesive sheet according to claim 3 , wherein said epoxy group-containing (meth)acrylic copolymer comprises an acrylic rubber.
15. The dicing tape integrated adhesive sheet according to claim 5 , wherein said epoxy group-containing (meth)acrylic copolymer comprises an acrylic rubber.