Method for manufacturing CIS based thin film solar cell device
Before a buffer layer deposition step P 5 , a pre-rinse step P 4 is provided to remove deposits deposited on the surface of a CIS-based light absorbing layer 3 D. Thus, the disturbing factors of the formation reaction of the buffer layer are removed, thereby to improve the coverage of the buffer layer, and to hold the transparency thereof. In addition, a rinse step P 6 is provided after the step P 5 . Thus, the colloidal solid matter remaining on the buffer layer surface is cleaned and removed with a rinse solution, thereby to hold the high resistivity. The rinse solution from a second rinse tank of the step P 6 is re-used. After the step P 6 , a draining/drying step P 7 is provided. After drying, an n-type window layer (transparent conductive film) is deposited.
1. A method for manufacturing a CIS-based thin-film solar cell device having a pn heterojunction of a substrate structure comprising:
providing
a substrate,
a metal back electrode layer stacked on the substrate, and
a CIS-based light absorbing layer having a p-type conductivity type stacked on the metal back electrode layer;
providing a pre-rinse solution, wherein the pre-rinse solution includes one of pure water, aqueous solution, and lower amine solution, and heating the pre-rinse solution to a temperature substantially equal to a temperature of buffer layer growth tank;
removing with the pre-rinse solution deposits deposited on a surface of the CIS-based light absorbing layer;
depositing an n-type buffer layer on the surface of the CIS-based light absorbing layer subsequent to the removing with the pre-rinse solution; and
depositing an n-type window layer on the n-type buffer layer, wherein the n-type window layer has an opposite conductivity type from that of the CIS-based light absorbing layer, and has a conductivity.
2. The method for manufacturing a CIS-based thin-film solar cell device according to claim 1 , wherein the removing with the pre-rinse solution includes bubbling one of air and nitrogen gas into the pre-rinse solution.
3. The method for manufacturing a CIS-based thin-film solar cell device according to claim 1 , further comprising:
repeating the removing with the pre-rinse solution.
4. The method for manufacturing a CIS-based thin-film solar cell device according to claim 3 , further comprising:
removing through a filter the deposits from the pre-rinse solution used in the removing with the pre-rinse solution; and
re-using the pre-rinse solution obtained from the removing through the filter.
5. The method for manufacturing a CIS-based thin-film solar cell device according to claim 3 , further comprising:
discharging as liquid waste the pre-rinse solution used in the removing with the pre-rinse solution;
filtrating through a filter the pre-rinse solution obtained from the discharging as liquid waste; and
using pure water for preparation of a chemical liquid for growing the buffer layer the pre-rinse solution obtained from the filtrating through the filter.
6. The method for manufacturing a CIS-based thin-film solar cell device according to claim 1 , further comprising:
removing with a rinse solution colloidal solid matter formed and deposited on a surface of the n-type buffer layer during the depositing the n-type buffer layer.
7. The method for manufacturing a CIS-based thin-film solar cell device according to claim 6 ,
wherein the rinse solution is pure water.
8. The method for manufacturing a CIS-based thin-film solar cell device according to claim 6 , further comprising:
repeating the removing with the rinse solution.
9. The method for manufacturing a CIS-based thin-film solar cell device according to claim 8 , further comprising:
removing through a filter the colloidal solid matter from the rinse solution used in the removing with the rinse solution; and
re-using the rinse solution obtained from the removing through the filter.
10. The method for manufacturing a CIS-based thin-film solar cell device according to claim 8 , further comprising:
discharging as liquid waste the rinse solution used in the removing with the rinse solution; and
filtrating through a filter the rinse solution obtained from the discharging as liquid waste,
using pure water for preparation of a chemical liquid for growing the buffer layer the rinse solution obtained from the filtrating through the filter.
11. The method for manufacturing a CIS-based thin-film solar cell device according to claim 6 , comprising:
performing at least one of draining and drying after the removing with the rinse solution.
12. The method for manufacturing a CIS-based thin-film solar cell device according to claim 1 , wherein the depositing the n-type buffer layer includes:
providing a buffer layer growth tank;
providing a prescribed high resistance buffer layer growth solution including aqueous ammonia, a zinc source, and a sulfur source dissolved in pure water;
placing the prescribed high resistance buffer layer growth solution in the buffer growth tank; and
holding the buffer layer growth tank at a solution temperature of 70° C. to 90° C.
13. The method for manufacturing a CIS-based thin-film solar cell device according to claim 4 , comprising:
repeating the removing through the filter subsequent to repeating the removing with the pre-rinse solution; and
re-using the pre-rinse solution obtained from the repeating the removing through the filter.
14. The method for manufacturing a CIS-based thin-film solar cell device according to claim 5 , further comprising:
repeating the discharging as liquid waste subsequent to the repeating the removing with a pre-rinse solution;
repeating the filtrating through the filter subsequent to the repeating the discharging as liquid waste,
repeating the using the pure water subsequent to the repeating the filtrating through the filter.
15. The method for manufacturing a CIS-based thin-film solar cell device according to claim 6 ,
wherein the removing with the rinse solution includes bubbling one of air and nitrogen gas into the rinse solution.
16. The method for manufacturing a CIS-based thin-film solar cell device according to claim 8 ,
wherein the repeating the removing with the rinse solution includes bubbling of air and nitrogen gas into the rinse solution.
17. The method for manufacturing a CIS-based thin-film solar cell device according to claim 9 , further comprising:
repeating the removing through the filter subsequent to the repeating the removing with the rinse solution; and
re-using the rinse solution obtained from the repeating the removing through the filter.
18. The method for manufacturing a CIS-based thin-film solar cell device according to claim 10 , comprising:
repeating the discharging as liquid waste subsequent to the repeating the removing with the rinse solution;
repeating the filtrating through the filter subsequent to the repeating the discharging as liquid waste,
repeating the using the pure water subsequent to the repeating the filtrating through the filter.
19. The method for manufacturing a CIS-based thin-film solar cell device according to claim 6 ,
wherein the depositing the n-type buffer layer deposition includes:
providing a buffer layer growth tank;
providing a prescribed high resistance buffer layer growth solution including aqueous ammonia, a zinc source, and a sulfur source dissolved in pure water;
placing the prescribed high resistance buffer layer growth solution in the buffer growth tank; and
holding the buffer layer growth tank at a solution temperature of 70° C. to 90° C.
20. The method for manufacturing a CIS-based thin-film solar cell device according to claim 1 , further comprising:
removing with a rinse solution colloidal solid matter formed and deposited on a surface of the n-type buffer layer during the depositing the n-type buffer layer;
wherein the removing with the rinse solution precedes the depositing the n-type window layer.