Capacitor and method of manufacturing the same comprising a stabilizing member
A capacitor includes a cylindrical storage electrode formed on a substrate. A ring-shaped stabilizing member encloses an upper portion of the storage electrode to structurally support the storage electrode and an adjacent storage electrode. The ring-shaped stabilizing member is substantially perpendicular to the storage electrode and extends in a direction where the adjacent storage electrode is arranged. A dielectric layer is formed on the storage electrode. A plate electrode is formed on the dielectric layer.
1. A capacitor comprising:
a plurality of cylindrical storage electrodes formed on a substrate;
a plurality of ring-shaped stabilizing members, each ring-shaped stabilizing member enclosing one of the storage electrodes to structurally support the storage electrodes, the stabilizing members being substantially perpendicular to the storage electrodes and extending to adjacent storage electrodes;
a dielectric layer formed on the storage electrodes; and
a plate electrode formed on the dielectric layer,
wherein each stabilizing member is spaced apart from an adjacent stabilizing member in a first direction and is not connected to the adjacent stabilizing member in the first direction and the stabilizing member is directly connected to another adjacent stabilizing member along a slant direction relative to the first direction,
wherein an annular groove for receiving the stabilizing member is formed at an upper outer face of each of the storage electrodes, and
wherein a lower annular groove is formed at a lower outer surface of each of the storage electrodes.
2. The capacitor of claim 1 , wherein the storage electrodes have a substantially uniform thickness.
3. The capacitor of claim 1 , wherein an annular protrusion corresponding to the annular groove is formed at an upper inner face of the storage electrodes.
4. The capacitor of claim 1 , wherein the stabilizing member extends from an inner face of the annular groove.
5. The capacitor of claim 1 , wherein an annular protrusion corresponding to the lower annular groove is formed at a lower inner face of the storage electrodes.