Dual pressure sensor
A dual pressure sensor using a reduced number of parts to simplify its structure and having increased ease of assembly and improved air tightness. The dual pressure sensor has an airtight container, two pressure sensor units received in the airtight container so as to be in intimate contact with each other and a substrate. The pressure sensor units has two bases, two pressure sensing diaphragm chips, and an output correction circuit. The pressure sensing diaphragm chips are secured to the bases, respectively. The bases are constructed respectively from base bodies having communication paths formed inside them and also respectively from pressure introduction sections integral with and projecting from the base bodies. The pressure introduction sections respectively project outward from insertion holes formed in the airtight container.
1. A dual pressure sensor comprising:
an airtight container having two through holes and having a pressure reference chamber formed on the inside thereof; and
two pressure sensor units, disposed within the pressure reference chamber, for detecting two pressures to be measured; wherein:
the two pressure sensor units each comprise:
at least one substrate and
at least one pressure-sensitive diaphragm chip for detecting respective pressures to be measured by converting into electrical signals displacements of diaphragms of the respective pressure-sensitive diagram chips due to the respective application of the pressures to be measured; and
the at least one substrate of each individual pressure sensor unit comprises:
a substrate main unit that has a small hole and has a connecting duct formed therein, and wherein the pressure-sensitive diaphragm chip is secured so as to block the small hole; and
a pressure connecting portion, formed integrally with the substrate main unit and protruding therefrom, having a pressure connecting hole for connecting to the connecting duct, wherein one end extends to the outside of the airtight container from the two through holes, to connect the individual pressure to be measured through the connecting duct to the diaphragm of the pressure-sensitive diaphragm chip; wherein
the opposing side faces of each of the substrate main units are in contact with each other.
2. The dual pressure sensor of claim 1 , comprising:
positioning protruding portions for positioning the two pressure sensor units; and
wherein:
the pressure connecting portions of the substrates pass through the two through holes of the airtight container and the substrate main units are positioned by the positioning protruding portions so as to be lined up with the opposing side faces of the substrate main units in contact with each other.
3. The dual pressure sensor of claim 1 , wherein:
the pressure to be measured, which is connected from the pressure connecting hole of the pressure connecting portion, is connected to the pressure-sensitive diaphragm chip through a connecting duct with a hole size that is larger than the hole size of the pressure connecting hole, and through a small hole with a hole size that is smaller than the hole size of the connecting duct.
4. The dual pressure sensor of claim 2 , wherein:
the pressure to be measured, which is connected from the pressure connecting hole of the pressure connecting portion, is connected to the pressure-sensitive diaphragm chip through a connecting duct with a hole size that is larger than the hole size of the pressure connecting hole, and through a small hole with a hole size that is smaller than the hole size of the connecting duct.
5. The dual pressure sensor of claim 2 , wherein:
the pressure connecting portions of the substrates pass through seal materials at the two through holes of the airtight container.
6. The dual pressure sensor of claim 4 , wherein:
the pressure connecting portions of the substrates pass through seal materials at the two through holes of the airtight container.
7. The dual pressure sensor of claim 1 , wherein an output correcting circuit is disposed on the top surface of the substrate main unit.
8. The dual pressure sensor of claim 2 , wherein an output correcting circuit is disposed on the top surface of the substrate main unit.
9. The dual pressure sensor of claim 3 , wherein an output correcting circuit is disposed on the top surface of the substrate main unit.
10. The dual pressure sensor of claim 4 , wherein an output correcting circuit is disposed on the top surface of the substrate main unit.
11. The dual pressure sensor of claim 5 , wherein an output correcting circuit is disposed on the top surface of the substrate main unit.
12. The dual pressure sensor of claim 6 , wherein an output correcting circuit is disposed on the top surface of the substrate main unit.
13. The dual pressure sensor of claim 1 , wherein the two pressure sensor units each can be replaced independently.
14. The dual pressure sensor of claim 2 , wherein the two pressure sensor units each can be replaced independently.
15. The dual pressure sensor of claim 3 , wherein the two pressure sensor units each can be replaced independently.
16. The dual pressure sensor of claim 4 , wherein the two pressure sensor units each can be replaced independently.
17. The dual pressure sensor of claim 5 , wherein the two pressure sensor units each can be replaced independently.
18. A dual pressure sensor of claim 6 , wherein the two pressure sensor units each can be replaced independently.