Phase change material, phase change memory device including the same, and methods of manufacturing and operating the phase change memory device
Disclosed may be a phase change material alloy, a phase change memory device including the same, and methods of manufacturing and operating the phase change memory device. The phase change material alloy may include Si and Sb. The alloy may be a Si—O—Sb alloy further including O. The Si—O—Sb alloy may be Si x O y Sb z , wherein, when x/(x+z) may be x 1 , 0.05≦x 1 ≦0.30, 0.00≦y≦0.50, and x+y+z may be 1. The Si—O—Sb alloy may further comprise an element other than Si, O, and Sb.
1. A phase change material comprising an alloy composed of silicon (Si), antimony (Sb) and oxygen (O), wherein the alloy is in the form of Si—O—Sb.
2. The phase change material of claim 1 , wherein the alloy in the form of Si—O—Sb is Si x O y Sb z , and wherein when x/(x+z) is x 1 , about 0.05≦x 1 ≦about 0.30, about 0.00≦y≦about 0.50, and x+y+z is 1.
3. The phase change material of claim 1 , wherein the Si—O—Sb alloy further comprises an element other than Si, O, and Sb.
4. A phase change memory device comprising:
a switching device; and
a storage node connected to the switching device,
wherein the storage node includes a layer composed of the phase change material of claim 1 .
5. The phase change memory device of claim 4 , wherein the alloy in the form of Si—O—Sb is Si x O y Sb z , and wherein when x/(x+z) is x 1 , about 0.05≦x 1 ≦about 0.30, about 0.00≦y≦about 0.50, and x+y+z is 1.
6. The phase change memory device of claim 4 , wherein the Si—O—Sb alloy further comprises an element other than Si, O, and Sb.
7. A method of manufacturing a phase change memory device, the method comprising:
forming a switching device; and
forming a storage node,
wherein forming the storage node includes:
forming a lower layer connected to the switching device;
forming a phase change material layer on the lower layer; and
forming an upper layer on the phase change material layer, and
wherein the phase change material layer is formed of a phase change material including an alloy composed of Si, Sb and O, the alloy being in the form of Si—O—Sb.
8. The method of claim 7 , wherein the alloy in the form of Si—O—Sb is Si x O y Sb z , and wherein when x/(x+z) is x 1 , about 0.05≦x 1 ≦about 0.30, about 0.00≦y≦about 0.50, and x+y+z is 1.
9. The method of claim 7 , wherein the Si—O—Sb alloy is formed using a co-sputtering method using a Si target and a Sb target.
10. The method of claim 9 , wherein DC power is applied to the Si target, and RF power is applied to the Sb target.
11. The method of claim 7 , wherein the Si—O—Sb alloy further comprises an element other than Si, O, and Sb.
12. A method of operating a phase change memory device comprising:
maintaining a switching element connected to a phase change memory layer in an ON state; and
applying an operating voltage to the phase change memory layer between upper and lower layers,
wherein the phase change material layer is formed of a phase change material including an alloy composed of Si, Sb and O, the alloy being in the form of Si—O—Sb.
13. The method of claim 12 , wherein the alloy in the form of Si—O—Sb is Si x O y Sb z , and wherein when x/(x+z) is x 1 , about 0.05≦x 1 ≦about 0.30, about 0.00≦y≦about 0.50, and x+y+z is 1.
14. The method of claim 12 , wherein the Si—O—Sb alloy further comprises an element other than Si, O, and Sb.