Semiconductor memory device having amorphous contact plug
A semiconductor memory device includes: a semiconductor substrate; a field effect transistor formed on the semiconductor substrate; an interlayer dielectric layer formed on the field effect transistor; a contact plug connected to the field effect transistor through the interlayer dielectric layer; and a ferroelectric capacitor disposed on the interlayer dielectric layer and connected to the contact plug, wherein a contact surface between a lower electrode of the ferroelectric capacitor and the contact plug is smaller than a contact plug surface of the contact plug.
1. A semiconductor memory device, comprising:
a transistor;
an interlayer dielectric film formed above the transistor;
a metal contact plug having a first portion formed in the interlayer dielectric film, and a second portion formed on the first portion and on a part of the interlayer dielectric film, only a surface of the second portion being amorphous, the first portion and second portion being made of the same material and being formed monolithically;
a barrier film formed on the second portion of the metal contact plug;
a first electrode formed on the barrier film; and
a capacitance dielectric film formed above the first electrode, and a second electrode formed above the capacitance dielectric film, the capacitance dielectric film, the first electrode and the second electrode being configured without a positional deviation from the second portion of the metal contact plug.
2. The semiconductor memory device according to claim 1 , wherein the metal contact plug is formed of tungsten.
3. The semiconductor memory device according to claim 1 , further comprising an intermediate electrode formed in the interlayer dielectric film.
4. The semiconductor memory device according to claim 1 , wherein a diameter of the second portion of the metal contact plug is greater than a diameter of the first portion of the metal contact plug.
5. The semiconductor memory device according to claim 1 , further comprising a hydrogen barrier film formed on a part of the second portion of the metal contact plug, a part of the first electrode, a part of the capacitance dielectric film and a part of the second electrode.
6. A semiconductor memory device, comprising:
a transistor;
an interlayer dielectric film formed above the transistor;
a single piece T-shaped metal contact plug having integral horizontal and vertical portions, the entirety of the vertical portion being formed in the interlayer dielectric film, the entirety of the horizontal portion being formed above the interlayer dielectric film, a part of the horizontal portion directly contacting the interlayer dielectric film, only an upper surface of the horizontal portion being amorphous;
a barrier film formed on the horizontal portion of the single piece T-shaped metal contact plug, the surface of the horizontal portion directly contacting the entirety of a lower surface of the barrier film; and
a first electrode formed on the barrier film.
7. The semiconductor memory device according to claim 6 , wherein the single piece T-shaped metal contact plug is monolithic and formed of tungsten.
8. The semiconductor memory device according to claim 6 , further comprising a capacitance dielectric film formed above the first electrode, and a second electrode formed above the capacitance dielectric film, the entirety of each of the capacitance dielectric film, the first electrode and the second electrode overlapping with the horizontal portion of the single piece T-shaped metal contact plug.
9. The semiconductor memory device according to claim 8 , further comprising a hydrogen barrier film formed on a part of the horizontal portion of the contact plug, a part of the first electrode, a part of the capacitance dielectric film and a part of the second electrode.
10. The semiconductor memory device according to claim 6 , further comprising an intermediate electrode formed in the interlayer dielectric film.
11. The semiconductor memory device according to claim 6 , wherein a diameter of the horizontal portion of the single piece T-shaped metal contact plug is greater than a diameter of the vertical portion of the single piece T-shaped metal contact plug.