Device for the detection of electromagnetic waves and method for producing such a device
Device for the detection of electromagnetic waves with a first plate that contains a membrane and a detector structure fixed at least partially to the membrane, a second plate attached to the first plate, at least one contact point for surface mount technology on the first and/or second plate, whereby in a connection line between the detector structure and the contact point is at least partially led through the first and/or the second plate and that this connection line is at least partially prepared by film deposition and/or plating.
1. A device for the detection of electromagnetic waves, said device comprising:
a first plate having a membrane and a detector structure fixed at least partially to the membrane;
a second plate attached to the first plate;
at least one contact point for surface mount technology on the first and/or second plate; and
a connection line arranged between the detector structure and the contact point and at least partially led through the first and/or the second plate, wherein the connection line is at least partially prepared by film deposition and/or plating;
wherein the second plate is penetrable by electromagnetic waves to be measured.
2. The device of claim 1 , wherein the first and second plates are attached to each other at their facing surfaces.
3. The device of claim 1 , wherein the detector structure includes at least one thermocouple.
4. The device of claim 1 , wherein the detector structure includes an array of at least two detectors, with each of the detectors including at least one thermocouple.
5. The device of claim 1 , wherein the detection structure is configured as a surface mount device (SMD)-structure.
6. The device of claim 1 , wherein at least one of the first and second plates contains a semi-conductor substrate.
7. The device of claim 1 , wherein the second plate contains means for influencing a wave-path of the electromagnetic waves.
8. The device of claim 1 , wherein an outward facing side of the device is at least partially coated with a material reflective for electromagnetic waves.
9. The device of claim 1 , wherein an outward facing side of the device is at least partially coated with a material absorptive for electromagnetic waves.
10. The device of claim 1 , constructed to shield the detector structure from electric and/or magnetic fields.
11. The device of claim 1 , further comprising an ASIC (Application-Specific Integrated Circuit) connected to at least one of the first and second plates.
12. The device of claim 1 , wherein the first plate includes a temperature sensor arranged separately from the detector structure.
13. A device for the detection of electromagnetic waves, said device comprising:
a first plate having a membrane and a detector structure fixed at least partially to the membrane, wherein the membrane at least partially borders a first closed cavity in the first plate; and
a second plate attached to the first plate, said second plate having a second closed cavity, with the membrane at least partially bordering the second cavity;
wherein the second plate is penetrable by electromagnetic waves to be measured.
14. The device of claim 13 , further comprising a connection line arranged between the detector structure and a contact point for surface mount technology on the first and/or second plate, said connection line being at least partially led through the first and/or the second plate, said connection line being at least partially prepared by film deposition and/or plating.
15. The device of claim 13 , wherein the membrane is at least partially arranged at a backside of the first plate, and the detector structure is at least partially fixed to the membrane on the backside of the first plate.
16. The device of claim 13 , wherein the first and second plates are attached to each other at their facing surfaces.
17. The device of claim 13 , wherein the detector structure includes at least one thermocouple.
18. The device of claim 13 , wherein the detector structure includes an array of at least two detectors, with each of the detectors including at least one thermocouple.
19. The device of claim 13 , wherein the detection structure is configured as a surface mount device (SMD)-structure.
20. The device of claim 13 , further comprising a third plate closing one of the first and second cavities.
21. The device of claim 13 , wherein at least one of the first and second plates contains a semi-conductor substrate.
22. The device of claim 20 , wherein the third plate contains a semi-conductor substrate.
23. The device of claim 20 , wherein at least one of the first, second and third plates contains a semi-conductor layer.
24. The device of claim 20 , wherein the first, second and third plates contain a same semi-conductor substrate.
25. The device of claim 24 , wherein at least one of the first, second and third plates contains silicon.
26. The device of claim 20 , wherein at least one of the first and third plates is penetrable by electromagnetic waves to be measured.
27. The device of claim 13 , wherein the second plate contains means for influencing a wave-path of the electromagnetic waves.
28. The device of claim 13 , wherein an outward facing side of the device is at least partially coated with a material reflective for electromagnetic waves.
29. The device of claim 13 , wherein an outward facing side of the device is at least partially coated with a material absorptive for electromagnetic waves.
30. The device of claim 13 , constructed to shield the detector structure from electric and/or magnetic fields.
31. The device of claim 13 further comprising a fluid connection between the first cavity and the second cavity.
32. The device of claim 20 , further comprising an ASIC (Application-Specific Integrated Circuit) connected to at least one of the first, second and third plates.
33. The device of claim 13 , wherein the first plate includes a temperature sensor arranged separately from the detector structure.
34. A method for producing a device for the detection of electromagnetic waves, with the device including a first plate having a membrane and a detector structure fixed at least partially to the membrane, and a second plate attached to the first plate, said method comprising the steps of:
producing at least one of the first and second plates as part of a first and a second wafer;
attaching the first and second wafers to each other to form a wafer-sandwich; and
singulating the device out of the wafer-sandwich;
wherein the second plate is penetrable by electromagnetic waves to be measured.
35. The method of claim 34 , further comprising the step of bonding two wafers to each other by a process selected from the group consisting of silicon-bonding, anodic bonding, eutectic bonding, and bonding with polymers.
36. A method for producing a device for the detection of electromagnetic waves, with the device including a first plate having a membrane and a detector structure fixed at least partially to the membrane, a second plate attached to the first plate, and a third plate closing a cavity of one of the first and second plates, said method comprising the steps of:
producing at least one of the first, second and third plates as part of a wafer;
attaching the first, second and third plates to each other; and singulating the device out of the wafer;
wherein the second plate is penetrable by electromagnetic waves to be measured.
37. The method of claim 36 , further comprising the step of bonding two wafers to each other by a process selected from the group consisting of silicon-bonding, anodic bonding, eutectic bonding, and bonding with polymers.