IP Library › Granted Patent US 8,008,838
Granted Patent B2
US 8,008,838 · App. 12/531,385 · Granted Aug 30, 2011

Lamb wave type elastic wave device

Assignee: University of Yamanashi
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Quick Facts
Patent No.
US 8,008,838
App. No.
12/531,385
Granted
Aug 30, 2011
Kind
B2
Abstract

Provided is a device of a high-frequency resonator using Lamb wave type elastic wave having excellent frequency temperature characteristics, the device having a significantly small frequency change, and including an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate. The cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfy any one of following expressions (Expressions 1 to 3): λ=90°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10°  (Expression 1) λ=210°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10°  (Expression 2) λ=330°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10°.  (Expression 3)

Claims (20)

1. A Lamb wave type elastic wave device having an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate, a cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfying any one of following expressions (Expressions 1 to 3)

Λ=88° to 92°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10°  (Expression 1)

λ=208° to 212°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10°  (Expression 2)

λ=328° to 332°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10°.  (Expression 3)

2. The Lamb wave type elastic wave device of claim 1 , wherein a ratio H/Λ of a thickness H of the quartz substrate to a periodic length Λ of the interdigital transducer ranges from 0.8 to 1.0.

3. A Lamb wave type elastic wave device having an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate, a cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfying any one of following expressions (Expressions 4 to 6)

λ=88° to 92°, μ=13° to 16° or μ=164° to 167°, θ=0° to 10°  (Expression 4)

λ=208° to 212°, μ=13° to 16° or μ=164° to 167°, θ=0° to 10°  (Expression 5)

λ=328° to 332°, μ=13° to 16° or μ=164° to 167°, θ=0° to 10°.  (Expression 6)

4. The Lamb wave type elastic wave device of claim 3 , wherein a ratio H/Λ of a thickness H of the quartz substrate to a periodic length Λ of the interdigital transducer ranges from 0.9 to 1.1.

5. A Lamb wave type elastic wave device having an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate, a cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfying any one of following expressions (Expressions 7 to 9)

λ=20° to 25°, μ=120° to 130°, θ=40° to 45°  (Expression 7)

λ=140° to 145°, μ=120° to 130°, θ=40° to 45°  (Expression 8)

λ=260° to 265°, μ=120° to 130°, θ=40° to 45°.  (Expression 9)

6. The Lamb wave type elastic wave device of claim 5 , wherein a ratio H/Λ of a thickness H of the quartz substrate to a periodic length Λ of the interdigital transducer ranges from 0.9 to 1.1.

7. A Lamb wave type elastic wave device having an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate, a cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfying a following expression (Expression 10), and a ratio H/Λ of a thickness H of the quartz substrate to a periodic length Λ of the interdigital transducer is 0.9

λ=90°, μ=18.997° or μ=180°−18.997°, θ=7.5°.  (Expression 10)

8. A Lamb wave type elastic wave device having an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate, a cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfying a following expression (Expression 11), and a ratio H/Λ of a thickness H of the quartz substrate to a periodic length Λ of the interdigital transducer is 0.9

λ=90°, μ=14.715° or μ=180°−14.715°, θ=0°.  (Expression 11)

9. A high-frequency resonator comprising the Lamb wave type elastic wave device of any one of claims 1 to 8 .

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 22, 2009
From: NAKAGAWA, YASUHIKO
To: UNIVERSITY OF YAMANASHI
Reel/Frame 023264/0305 →
Priority Claims (1)
JP 2007-065991 · Mar 15, 2007 · national
Continuity (1)
Related Publication 20100102668A1 · Apr 29, 2010