Organosiloxane materials for selective area deposition of inorganic materials
An atomic-layer-deposition process for forming a patterned thin film comprising providing a substrate, applying a deposition inhibitor material to the substrate, wherein the deposition inhibitor material is an organosiloxane compound; and patterning the deposition inhibitor material either after or simultaneously with or introducing applying the deposition inhibitor material to provide selected areas of the substrate effectively not having the deposition inhibitor material. The thin film is substantially deposited only in the selected areas of the substrate not having the deposition inhibitor material.
1. An atomic layer deposition process for forming a patterned inorganic thin film comprising:
(a) providing a substrate;
(b) applying a composition comprising a deposition inhibitor material to the substrate, wherein the deposition inhibitor material comprises an organosiloxane polymer, which may optionally be crosslinked;
(c) patterning the deposition inhibitor material, either after step (b) or simultaneously with applying the deposition inhibitor material to provide selected areas effectively not having the deposition inhibitor material; and
(d) depositing an inorganic thin film on the substrate by atomic layer deposition;
wherein the inorganic thin film is substantially deposited only in the selected areas of the substrate not having the deposition inhibitor material and
wherein the organosiloxane polymer is a fluorinated or partially fluorinated organosiloxane polymer.
2. The process of claim 1 wherein the organosiloxane polymer is crosslinked after applying the polymer onto the substrate, before or during patterning in step (c).
3. The process of claim 1 wherein the composition comprising the deposition inhibitor material further comprises a radiation-sensitive polymer.
4. The process of claim 3 wherein the radiation-sensitive polymer is poly(methyl methacrylate).
5. The process of claim 1 wherein the inorganic thin film is a metal or comprises a metal-containing compound.
6. The process of claim 5 wherein the metal-containing compound comprises a group V or group VI anion.
7. The process of claim 5 wherein the metal-containing compound is an oxide, nitride, sulfide, or phosphide.
8. The process of claim 5 wherein the metal-containing compound contains zinc, aluminum, titanium, hafnium, zirconium, and/or indium.
9. The process of claim 5 wherein the metal is copper, tungsten, aluminum, nickel, ruthenium, or rhodium.
10. The process of claim 1 wherein the deposition inhibitor material has an inhibition power of at least 200 Å during use.
11. The process of claim 1 wherein the processes of applying and patterning the deposition inhibitor material comprises depositing a uniform layer of deposition inhibitor material and subsequently patterning the layer.
12. The process of claim 1 where in the processes of applying and patterning the deposition inhibitor material comprises pattern-wise depositing the deposition inhibitor material.
13. The process of claim 12 wherein the pattern-wise deposition is inkjet printing, gravure, flexography, donor transfer, micro-contact printing, or offset lithography.
14. The process of claim 1 wherein the atomic layer deposition comprises spatially dependent ALD.
15. The process of claim 14 wherein the spatially dependent ALD comprises: simultaneously directing a series of gas flows along elongated substantially parallel channels, and wherein the series of gas flows comprise, in order, at least a first reactive gaseous material, an inert purge gas, and a second reactive gaseous material, optionally repeated a plurality of times, to form the thin film, and wherein the process is carried out substantially at or above atmospheric pressure, and wherein the temperature of the substrate during deposition is under 250 ° C.
16. The process of claim 15 wherein the series of gas flows are provided by a deposition device comprising, facing the substrate in plain view, a series of open elongated output openings, substantially in parallel, positioned over the substrate in close proximity thereto, in an output face of a deposition device spaced within 1 mm from the surface of the substrate subject to atomic layer deposition.
17. The process of claim 16 wherein there are elongated exhaust openings between the series of open elongated output openings for the first reactive gaseous material and the second reactive gaseous material.
18. The process of claim 1 wherein a given area of the substrate is exposed to a gas flow in an elongated output opening for less than 100 milliseconds.
19. The process of claim 15 wherein the second reactive gaseous material is a non-metallic compound.
20. The process of claim 16 wherein a surface area of the substrate exceeds a surface area of the output face of the deposition device.