Thin film transistor, method of fabricating the same, and organic light emitting diode display device having the thin film transistor
A thin film transistor (TFT), a method of fabricating the same, and an organic light emitting diode (OLED) display device having the TFT, the TFT includes a substrate, a protection layer disposed on the substrate, a buffer layer disposed on the protection layer, a semiconductor layer disposed on the buffer layer, a gate electrode disposed on the semiconductor layer, a gate insulating layer to electrically insulate the semiconductor layer from the gate electrode, and source and drain electrodes electrically insulated from the gate electrode and connected to the semiconductor layer. The protection layer is formed of an amine-containing clay. The OLED includes the TFT, an insulating layer disposed on the TFT, a first electrode connected to the drain electrode of the TFT, an organic layer disposed on the first electrode, and a second electrode disposed on the organic layer.
1. A thin film transistor (TFT) comprising:
a substrate;
a protection layer disposed on the substrate and comprising an amine-containing clay and an organic ammonium salt;
a buffer layer disposed on the protection layer;
a semiconductor layer disposed on the buffer layer;
a gate electrode disposed on the semiconductor layer;
a gate insulating layer to electrically insulate the semiconductor layer from the gate electrode; and
source and drain electrodes that are electrically insulated from the gate electrode and connected to the semiconductor layer,
wherein the clay has plate-shaped particles that are exfoliated and irregularly dispersed within the protection layer.
2. The TFT according to claim 1 , wherein the protection layer further comprises a polymer.
3. The TFT according to claim 1 , wherein the substrate comprises a glass or a plastic.
4. A method of fabricating a thin film transistor (TFT), comprising:
forming a protection layer comprising an amine-containing clay, on a substrate;
forming a buffer layer on the protection layer;
forming a semiconductor layer on the buffer layer;
forming a gate insulating layer on the semiconductor layer and the buffer layer;
forming a gate electrode on the gate insulating layer, in a position corresponding to the semiconductor layer;
forming an interlayer insulating layer on the gate insulating layer and the gate electrode; and
forming source and drain electrodes on the interlayer insulating layer, which are electrically connected to the semiconductor layer,
wherein the clay has plate-shaped particles that are exfoliated and irregularly dispersed within the protection layer, and
wherein the protection layer is formed by reacting a clay with an organic amine compound, such that positive metal ions in the clay are replaced by an organic ammonium salt.
5. The method according to claim 4 , wherein the protection layer is formed using one selected from the group consisting of a contact printing process, a noncontact printing process, a bar coating process, and a spin coating process.
6. The method according to claim 4 , wherein the forming of the protection layer comprises:
mixing a clay and an organic amine compound in water, to create a slurry; and
coating the substrate with the slurry, using a contact printing process, a noncontact printing process, a bar coating process, or a spin coating process.
7. A method of fabricating a thin film transistor (TFT), comprising:
forming a protection layer comprising an amine-containing clay, on a substrate;
forming a buffer layer on the protection layer;
forming a gate electrode on the buffer layer;
forming a gate insulating layer on the gate electrode;
forming a semiconductor layer on the gate insulating layer, in a position corresponding to the gate electrode; and
forming source and drain electrodes on the semiconductor layer, which are electrically insulated from the gate electrode,
wherein the clay has plate-shaped particles that are exfoliated and irregularly dispersed within the protection layer, and
wherein the forming of the protection layer comprises reacting a clay that is dispersed in water, with an organic amine compound, such that positive metal ions in the clay are replaced by an organic ammonium salt.
8. An organic light emitting diode (OLED) display device comprising:
a substrate;
a protection layer disposed on the substrate and comprising an amine-containing clay and an organic ammonium salt;
a buffer layer disposed on the protection layer;
a semiconductor layer disposed on the buffer layer;
a gate electrode disposed on the semiconductor layer;
a gate insulating layer to electrically insulate the semiconductor layer from the gate electrode;
source and drain electrodes that are electrically insulated from the gate electrode and connected to the semiconductor layer;
an interlayer insulating layer disposed on the gate insulating layer and the gate electrode;
a first electrode electrically connected to the drain electrode;
an organic layer disposed on the first electrode; and
a second electrode disposed on the organic layer,
wherein the clay has plate-shaped particles that are exfoliated and irregularly dispersed within the protection layer.
9. The OLED display device of claim 8 , wherein the protection layer further comprises a polymer.
10. The OLED display device of claim 8 , wherein the substrate comprises a glass or a plastic.