Electronic device, constituted by using thin-film transistors
View Patent ↗An integrated circuit, which is configured such that a MOS transistor and a bipolar transistor are integrated at the same time, is formed on an insulating substrate which includes a display device. An electronic device or a display includes a plurality of semiconductor devices which are formed by using a semiconductor thin film and are formed in the semiconductor thin film that is provided on an insulating substrate and is crystallized in a predetermined direction. The plurality of semiconductor devices include a MOS transistor and at least either one of a lateral bipolar thin-film transistor and a MOS-bipolar hybrid thin film transistor.
1. An electronic device, comprising:
an insulation film formed on an insulating substrate;
a non-crystallized semiconductor thin film formed on the insulation film;
at least one predetermined transistor formation region in a crystallized region which is crystallized in a lateral direction in the non-crystallized semiconductor thin film; and
a plurality of semiconductor devices which are formed in at least one of the at least one predetermined transistor formation region and the non-crystallized semiconductor thin film, wherein
the plurality of semiconductor devices include
at least one MOS thin film transistor,
at least one lateral bipolar thin film transistor, and
at least one MOS-bipolar hybrid thin film transistor, the at least one MOS-bipolar hybrid thin film transistor comprising a MOS thin film transistor construction and a lateral bipolar thin film transistor construction,
the at least one MOS-bipolar hybrid thin film transistor has
a source functioning as an emitter,
a drain functioning as a collector, and
a gate for forming a channel functioning as a base, the source and the drain are formed in the at least one predetermined transistor formation region or a region of the non-crystallized semiconductor thin film, the channel is formed in the at least one predetermined transistor formation region, and a current-amplification thin-film transistor circuit for amplifying a small current includes at least one of said at least one lateral bipolar thin film transistor and said at least one MOS-bipolar hybrid thin film transistor.
2. The electronic device according to claim 1 , further comprising:
an inductor provided on the insulation film formed on the insulating substrate and electrically connected to the current-amplification thin-film transistor circuit, wherein the current-amplification thin-film transistor circuit amplifies a current from the inductor.
3. The electronic device according to claim 2 , wherein the current has an intensity of 100 μAm or less.
4. The electronic device according to claim 1 , wherein the base of the MOS-bipolar hybrid thin film transistor has a width of 2 μm or less.
5. The electronic device according to claim 4 , wherein the at least one lateral bipolar thin film transistor has a base having a width of 2 μm or less.
6. The electronic device according to claim 1 , wherein directions of movement of carriers in the at least one MOS thin film transistor, the at least one lateral bipolar thin film transistor and the MOS-bipolar hybrid thin film transistor formed in the crystallized region are parallel to the lateral direction of crystallization.
7. The electronic device according to claim 1 , wherein no crystal grain boundary is present in at least one of the base and the channel of the at least one MOS thin film transistor, the at least one lateral bipolar thin film transistor and the at least one MOS-bipolar hybrid thin film transistor formed in the at least one predetermined transistor formation region.
8. The electronic device according to claim 1 , wherein a thickness of the non-crystallized semiconductor thin film is 30 nm to 360 nm.
9. The electronic device according to claim 1 , wherein a base length of the at least one lateral bipolar thin film transistor is 2 μm or less.
10. The electronic device according to claim 1 , wherein the base of the at least one MOS-bipolar hybrid thin film transistor has a minimum length of 2 μm or less.
11. The electronic device according to claim 1 , wherein the at least one MOS thin film transistor includes a gate having a minimum length of 1 μm or less.
12. The electronic device according to claim 1 , wherein the crystallized region in which the at least one predetermined transistor formation region of the non-crystallized semiconductor thin film is crystallized in the lateral direction forms a temperature gradient in the at least one predetermined transistor formation region of the non-crystallized semiconductor thin film to melt the non-crystallized semiconductor thin film, a base length of the at least one lateral bipolar thin film transistor, which is a re-crystallized region, being 2 μm or less.