Semiconductor devices testing apparatus with temperature-adjusting design

1. A probing apparatus, comprising:

a housing configured to define a testing chamber;

a device holder positioned in the housing and configured to receive at least one device under test;

a temperature-controller positioned in the device holder and configured to control the temperature of the device holder;

a platen positioned on the housing and configured to retain at least one probe; and

at least one flow line positioned in the platen, wherein the flow line is configured to flow a fluid therein to adjust the temperature of the platen.

2. The probing apparatus of claim 1 , wherein the temperature-controller is a heater.

3. The probing apparatus of claim 1 , wherein the platen is configured to retain a probe card including the probe.

4. The probing apparatus of claim 3 , wherein the platen is configured to retain a probe card by using a card holder.

5. The probing apparatus of claim 1 , wherein the platen is configured to retain at least one stage, and the probe is positioned on the stage.

6. The probing apparatus of claim 1 , wherein the platen includes an opening and the probe contacts the device under test through the opening.

7. The probing apparatus of claim 6 , wherein the flow line is positioned around the opening of the platen.

8. The probing apparatus of claim 1 , wherein the flow line includes at least one inlet and one outlet.

9. The probing apparatus of claim 1 , wherein the fluid is gas, liquid, or a mixture thereof.

10. The probing apparatus of claim 1 , wherein the platen includes a plurality of plates, and the flow line is positioned on one of the plates.

11. The probing apparatus of claim 1 , wherein the platen includes:

a bottom plate positioned on the housing; and

an upper plate positioned on the bottom plate;

wherein one of the bottom plate and the upper plate includes a groove.

12. The probing apparatus of claim 1 , wherein the platen includes:

a bottom plate positioned on the housing and having a bottom groove;

an upper plate positioned on the bottom plate and having an upper groove corresponding to the bottom groove; and

wherein the flow line is a guiding tube positioned in the bottom groove and the upper groove.

13. A probing apparatus, comprising:

a platen positioned on a testing chamber and configured to retain at least one probe, the platen including an opening and the probe contacting a device under test through the opening; and

at least one flow line positioned in the platen, wherein the flow line is configured to flow a fluid therein to adjust the temperature of the platen.

14. The probing apparatus of claim 13 , wherein the platen is configured to retain a probe card including the probe.

15. The probing apparatus of claim 14 , wherein the platen is configured to retain a probe card by using a card holder.

16. The probing apparatus of claim 13 , wherein the platen is configured to retain at least one stage, and the probe is positioned on the stage.

17. The probing apparatus of claim 6 , wherein the flow line is positioned around the opening of the platen.

18. The probing apparatus of claim 13 , wherein the flow line includes at least one inlet and one outlet.

19. The probing apparatus of claim 13 , wherein the fluid is gas, liquid, or a mixture thereof.

20. The probing apparatus of claim 13 , wherein the platen includes a plurality of plates, and the flow line is positioned on one of the plates.

21. The probing apparatus of claim 13 , wherein the platen includes:

a bottom plate positioned on the housing; and

an upper plate positioned on the bottom plate;

wherein one of the bottom plate and the upper plate includes a groove.

22. The probing apparatus of claim 13 , wherein the platen includes:

a bottom plate positioned on the housing and having a bottom groove;

an upper plate positioned on the bottom plate and having an upper groove corresponding to the bottom groove; and

wherein the flow line is a guiding tube positioned in the bottom groove and the upper groove.