IP Library › Granted Patent US 8,043,520
Granted Patent B2
US 8,043,520 · App. 12/355,170 · Granted Oct 25, 2011

Method for manufacturing porous structure and method for forming pattern

Assignee: Kabushiki Kaisha Toshiba
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,043,520
App. No.
12/355,170
Granted
Oct 25, 2011
Kind
B2
Abstract

A pattern forming material contains a block copolymer or graft copolymer and forms a structure having micro polymer phases, in which, with respect to at least two polymer chains among polymer chains constituting the block copolymer or graft copolymer, the ratio between N/(Nc−No) values of monomer units constituting respective polymer chains is 1.4 or more, where N represents total number of atoms in the monomer unit, Nc represents the number of carbon atoms in the monomer unit, No represents the number of oxygen atoms in the monomer unit.

Claims (16)

1. A method for manufacturing a porous structure comprising:

forming a molded product comprised of a pattern forming material, wherein the pattern forming material comprises a block copolymer or graft copolymer comprising:

a polymer chain selected from the group consisting of a polyacrylonitrile chain, a polyacrylonitrile derivative chain, a polycyclohexadiene derivative chain and a polybutadiene chain; and

a thermally decomposable polymer chain;

forming a microphase-separated structure in the molded product, said microphase-separated structure comprising a thermally decomposable polymer phase and a remaining polymer phase;

forming a porous structure having the remaining polymer phase by removing the thermally decomposable polymer phase by heating said molded product to a thermal decomposition temperature or more.

2. The method according to claim 1 , further comprising

filling one or more pores of the porous structure with an inorganic material.

3. The method according to claim 1 , further comprising

using said porous structure as at least part of one or more electrodes in an electrochemical cell comprising at least a pair of electrodes and an electrolyte layer interposed between the electrodes.

4. The method according to claim 3 , wherein the porous structure has a three-dimensional network structure comprising microdomains, and said porous structure comprises a continuous pore having correlation distances at both 2√{square root over (3)} times and 4 times a radius of gyration of cross section of the microdomains.

5. The method according to claim 3 , wherein the porous structure is a porous carbon structure.

6. The method according to claim 5 , wherein the porous carbon structure has cylindrical pores having an average size from 0.1 to 100 nm which are arranged in a honeycomb manner.

7. The method according to claim 1 , wherein the porous structure has a three-dimensional network structure comprising microdomains, and said porous structure comprises a continuous pore having correlation distances at both 2√{square root over (3)} times and 4 times a radius of gyration of cross section of the microdomains.

8. The method according to claim 1 , wherein the porous structure is a porous carbon structure.

9. The method according to claim 1 , wherein the porous carbon structure has cylindrical pores having an average size from 0.1 to 100 nm which are arranged in a honeycomb manner.

Priority Claims (3)
JP 11-159479 · Jun 7, 1999 · national
JP 11-262326 · Sep 16, 1999 · national
JP 2000-169263 · Jun 6, 2000 · national
Continuity (4)
Division 11455916 · Jun 20, 2006
Division 10374956 · Jan 22, 2003
Division 09588721 · Jun 7, 2000
Related Publication 20090130380A1 · May 21, 2009