Optical part holding member and production method thereof
View Patent ↗The present invention relates to an optical part holding member made of ceramic and a production method thereof, and provides an optical part holding member made of ceramic such that a sintered body after processes of degreasing and sintering has small dimensional changes over dimensions of a mold, and a production method thereof. An example includes a lens holder to hold an optical part, made of a silicon nitride ceramic base composite material produced through a process in which silicon and nitrogen are reacted to be nitrided and contains silicon carbide and an iron compound.
1. An optical part holding member to hold an optical part, wherein the optical part holding member is made of a silicon nitride ceramic base composite material that is produced through a process in which silicon and nitrogen are reacted to be nitrided, and
silicone carbide and an iron compound are contained in the silicon nitride ceramic base composite material,
wherein the iron compound contained in the silicon nitride ceramic base composite material is at least iron silicide,
wherein the silicon nitride ceramic base composite material is obtained by:
producing a mixed power by adding silicon carbide powder and iron oxide powder to silicon powder; and then
degreasing a molded body produced by adding an organic binder; and
causing silicon and nitrogen to be reacted in a nitrogen atmosphere,
wherein, when the molded body is formed, silicon carbide of 20-50 mass % and iron oxide Fe 3 O 4 of 5-15 mass % are mixed to silicon to be molded.
2. The optical part holding member according to claim 1 , wherein a reflectance with respect to visible light is 1% or less and a surface roughness Ra is 1 μm or less.
3. A method of producing an optical part holding member to hold an optical part, made of a silicon nitride ceramic base composite material that is produced through a process in which silicon and nitrogen are reacted to be nitrided, wherein the silicon nitride ceramic base composite material is obtained by:
producing a mixed power by adding silicon carbide powder and iron oxide powder to silicon powder; and then
degreasing a molded body produced by adding an organic binder; and
causing silicon and nitrogen to be reacted in a nitrogen atmosphere;
wherein, when the molded body is formed, silicon carbide of 20-50 mass % and iron oxide Fe 3 O 4 of 5-15 mass % are mixed to silicon to be molded, and
wherein the molded body is formed by injection molding.
4. A method of producing an optical part holding member to hold an optical part, made of a silicon nitride ceramic base composite material that is produced through a process in which silicon and nitrogen are reacted to be nitrided, wherein the silicon nitride ceramic base composite material is obtained by:
producing a mixed power by adding silicon carbide powder and iron oxide powder to silicon powder; and then
degreasing a molded body produced by adding an organic binder; and
causing silicon and nitrogen to be reacted in a nitrogen atmosphere;
wherein, when the molded body is formed, silicon carbide of 20-50 mass % and iron oxide Fe 3 O 4 of 5-15 mass % are mixed to silicon to be molded, and
wherein, when the molded body is degreased and sintered, the silicon nitride ceramic base composite material is formed such that dimensions thereof after sintering fall within a tolerance of 0.1% over dimensions of a mold for forming the molded body without processing after being sintered.