IP Library Granted Patent US 8,061,500
Granted Patent B2
US 8,061,500 · App. 12/256,719 · Granted Nov 22, 2011

Alignment device and method to align plates for electronic circuits

Assignee: Applied Materials Italia S.R.L.
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Quick Facts
Patent No.
US 8,061,500
App. No.
12/256,719
Granted
Nov 22, 2011
Kind
B2
Abstract

An alignment device to align a plate for electronic circuits comprises transport members able to transport the plate along a transport axis, at least from an entrance position to an alignment position defining an alignment plane. The device also comprises mobile members provided with: first movement members able to move the mobile members in a first direction directed along a first axis substantially perpendicular to the alignment plane so as to associate the mobile members with the plate; second movement members able to rotate the plate, associated with the mobile members, around the first axis; and at least third movement members able to move the plate, associated with the mobile members, in a second direction, directed along a second axis substantially transverse to the first axis and substantially co-planar with the transport axis.

Claims (28)

1. An alignment device to align a plate for electronic circuits, comprising:

transport means for transporting said plate over a mobile alignment turret along a transport axis (Y), at least from an entrance position to an alignment position defining an alignment plane (P), the mobile alignment turret comprising:

first movement means for vertically moving a portion of said mobile alignment turret in a first direction directed along a first axis (Z) substantially perpendicular to said alignment plane (P) so as to move the portion of said mobile alignment turret with respect to said plate;

second movement means for rotating said first movement means, with respect to said mobile alignment turret, around said first axis (Z); and

third movement means for moving said first movement means with respect to said mobile alignment turret, in a second direction, directed along a second axis (X) substantially transverse to said first axis (Z) and substantially perpendicular to and co-planar with said transport axis (Y).

2. The alignment device of the claim 1 , wherein said mobile alignment turret is disposed below said alignment plane (P).

3. The alignment device of the claim 1 , wherein said mobile alignment turret is provided with fourth movement means for moving said first movement means with respect to said mobile alignment turret, in a third direction, directed along said transport axis (Y).

4. The alignment device of the claim 1 , wherein said first movement means comprises manipulator means for adhering to a surface of said plate.

5. The alignment device of the claim 4 , wherein said manipulator means comprises gripper elements.

6. The alignment device of claim 5 , wherein the gripper elements comprises suction cups.

7. The alignment device of claim 5 , wherein the gripper elements are disposed in correspondence with said alignment position and are symmetrical with respect to the transport axis (Y).

8. The alignment device of claim 4 , wherein the manipulator means is associated with said plate through an aperture.

9. The alignment device of the claim 1 , wherein said mobile alignment turret comprises a movement unit.

10. The alignment device of the claim 9 , wherein said movement unit connects said second movement means and said third movement means to said first movement means.

11. The alignment device of the claim 1 , further comprising an image acquisition camera disposed in correspondence with said alignment position.

12. The alignment device of the claim 11 , further comprising an LED configured to facilitate the acquisition of images detected by the image acquisition camera.

13. A method for aligning a plate for electronic circuits comprising:

conveying said plate over a mobile alignment turret, along a transport axis (Y), at least from an entrance position to an alignment position defining an alignment plane (P);

moving vertically a manipulator with respect to the mobile alignment turret in a first direction, directed along a first axis (Z) substantially perpendicular to said alignment plane (P), so as to associate said mobile alignment turret with said plate;

using a rotation member to rotate said manipulator with respect to said mobile alignment turret, around said first axis (Z);

using a first sliding member to move said manipulator with respect to said mobile alignment turret, in a second direction, directed along a second axis (X) substantially transverse to said first axis (Z) and substantially perpendicular to and co-planar with said transport axis (Y); and

using a second sliding member to move said manipulator with respect to said mobile alignment turret, in a third direction, directed along said transport axis (Y).

14. An apparatus for processing a substrate, comprising:

a conveyor disposed over an alignment plane (P), the conveyor being movable along a transport axis (Y);

a manipulator disposed below the alignment plane (P), the manipulator being vertically movable in a first direction directed along a first axis (Z) substantially perpendicular to the alignment plane (P);

a rotation member coupled to the manipulator, the manipulator being rotatable around the first axis (Z);

a first sliding member coupled to the rotation member, the first sliding member being movable in a second direction directed along a second axis (X), wherein the second axis (X) is substantially perpendicular to and co-planar with the transport axis (Y); and

a second sliding member coupling to the rotation member, the second sliding member being movable in a third direction directed along the transport axis (Y).

Assignments (3)
CHANGE OF NAME Recorded Aug 5, 2010
From: APPLIED MATERIALS BACCINI S.P.A.
To: APPLIED MATERIALS ITALIA S.R.L.
Reel/Frame 024797/0837 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE NAME PREVIOUSLY RECORDED ON REEL 022072 FRAME 0118. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGMENT. Recorded Aug 3, 2010
From: ANDREA BACCINI
To: APPLIED MATERIALS BACCINI S.P.A.
Reel/Frame 024783/0138 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 6, 2009
From: BACCINI, ANDREA
To: APPLIED MATERIALS BACCINI SPA CON SOCIO UNICO
Reel/Frame 022072/0118 →
Priority Claims (1)
IT UD2007A0197 · Oct 24, 2007 · national
Continuity (1)
Related Publication 20090202323A1 · Aug 13, 2009