Aqueous cleaning composition for semiconductor copper processing
The invention relates to an aqueous cleaning composition for use in a cleaning process during or after a chemical mechanical planarization for a copper integrated circuit processing, comprising 0.05 to 20 wt % of a nitrogen-containing heterocyclic organic base, 0.05 to 50 wt % of an alcohol amine, 0.01-10 wt % of a quaternary ammonium hydroxide, and water. When used during or after the planarization process, the inventive cleaning composition of the invention can effectively remove residual contaminants from the surfaces of the wafers and simultaneously maintain a good surface roughness of the wafers.
1. An aqueous cleaning composition used in the cleaning process during or after a chemical mechanical planarization, consisting essentially of (a) 0.05 to 20 wt % of a nitrogen-containing heterocyclic organic base, wherein the organic base is selected from the group consisting of piperazine, 2-(1-piperazine)ethanol, and a mixture thereof; (b) 0.05 to 50 wt % of an alcohol amine; (c) 0.01 to 10 wt % of a quaternary ammonium hydroxide; and (d) water.
2. The composition according to claim 1 , wherein the alcohol amine is selected from the group consisting of ethanolamine, diethanolamine, triethanolamine, propanolamine, methyl ethanolamine, and methyl diethanolamine, and a mixture thereof.
3. The composition according to claim 2 , wherein the alcohol amine is selected from the group consisting of ethanolamine, diethanolamine, and triethanolamine, and a mixture thereof.
4. The composition according to claim 1 , wherein the quaternary ammonium hydroxide is a tetraalkylammonium hydroxide.
5. The composition according to claim 4 , wherein the tetraalkylammonium hydroxide is selected from the group consisting of tetramethylammonium hydroxide, tetraethyl ammonium hydroxide, tetrapropylammonium hydroxide, and tetrabutylammonium hydroxide, and a mixture thereof.
6. The composition according to claim 1 , wherein the nitrogen-containing heterocyclic organic base is used in an amount ranging from 0.1 to 15 wt %.
7. The composition according to claim 6 , wherein the nitrogen-containing heterocyclic organic base is used in an amount ranging from 0.15 to 10 wt %.
8. The composition according to claim 1 , wherein the alcohol amine is used in an amount ranging from 0.1 to 45 wt %.
9. The composition according to claim 8 , wherein the alcohol amine is used in an amount ranging from 0.15 to 40 wt %.
10. The composition according to claim 1 , wherein the quaternary ammonium hydroxide is used in an amount ranging from 0.02 to 10 wt %.
11. The composition according to claim 10 , wherein the quaternary ammonium hydroxide is used in an amount ranging from 0.05 to 8 wt %.