Method for manufacturing semiconductor device

1. A method for manufacturing a semiconductor device comprising:

forming a first interlayer insulating film over a semiconductor substrate;

forming a first opening in the first interlayer insulating film;

forming a second interlayer insulating film on the first interlayer insulating film to cover the first opening such that the first opening is not filled and forms a cavity;

forming a second opening in the second interlayer insulating film such that the second opening is connected to the first opening to form a coupled opening;

forming a first conductive film such that the first conductive film covers an inner surface of the coupled opening;

forming a capacitor insulating film on the first conductive film; and

forming a second conductive film on the capacitor insulating film to form a capacitor including the first conductive film, the capacitor insulating film, and the second conductive film.

2. The method for manufacturing the semiconductor device according to claim 1 ,

wherein a thickness of the first interlayer insulating film is set according to a predetermined opening size of the first opening such that an aspect ratio of the first opening is at most 30, and

a thickness of the second interlayer insulating film is set according to a predetermined opening size of the second opening such that an aspect ratio of the second opening is at most 30.

3. The method for manufacturing the semiconductor device according to claim 1 , wherein the second interlayer insulating film is formed by PE-CVD.

4. The method for manufacturing the semiconductor device according to claim 1 , further comprising forming a trench for a guard ring surrounding a memory cell area where the capacitor is disposed, wherein the coupled opening and the trench are formed simultaneously.

5. A method for manufacturing a semiconductor device comprising forming a through-hole in an interlayer insulating film,

wherein the interlayer insulating film is obtained by stacking a partial interlayer insulating film plural times; and

the through-hole is obtained by

forming a lower layer-side partial interlayer insulating film,

forming an opening in the lower layer-side partial interlayer insulating film,

forming an upper layer-side partial interlayer insulating film on the lower layer-side partial interlayer insulating film with the opening formed therein to cover the opening such that the opening is not filled and forms a cavity, and

forming an opening in the upper layer-side partial interlayer insulating film such that the opening in the upper layer-side partial interlayer insulating film is connected to the opening in the lower layer-side partial interlayer insulating film.

6. The method for manufacturing the semiconductor device according to claim 5 , wherein a thickness of each of the partial interlayer insulating films is set according to predetermined opening size of each of the openings such that an aspect ratio of each of the openings is at most 30.

7. The method for manufacturing the semiconductor device according to claim 5 , further comprising forming a conductive film on the interlayer insulating film to cover an inner side of the through-hole.

8. A method comprising:

forming a first insulating layer over a substrate;

selectively removing the first insulating layer to form a first hole in the first insulating layer;

depositing a second insulating layer over the first insulating layer to cap the first hole by the second insulating layer with leaving a cavity in the first hole;

selectively removing the second insulating layer to form a second hole; the second hole penetrating through the second insulating layer to reach the cavity;

forming a first conductive layer such that the first conductive layer covers an inner surface of the first and second holes;

forming a capacitor insulating layer on the first conductive layer; and

forming a second conductive layer on the capacitor insulating layer to form a capacitor including the first conductive layer, the capacitor insulating layer, and the second conductive layer.

9. The method according to claim 8 ,

wherein a thickness of the first insulating layer is set according to a predetermined hole size of the first hole such that an aspect ratio of the first hole is at most 30, and

a thickness of the second insulating layer is set according to a predetermined hole size of the second hole such that an aspect ratio of the second hole is at most 30.

10. The method according to claim 8 , wherein the second insulating layer is formed by PE-CVD.

11. The method according to claim 8 , further comprising forming a trench for a guard ring surrounding a memory cell area where the capacitor is disposed, wherein the first and second holes and the trench are formed simultaneously.