Upper layer-forming composition and photoresist patterning method
An upper layer-forming composition formed on a photoresist while causing almost no intermixing with the photoresist film and a photoresist patterning method are provided. The upper layer-forming composition is stably maintained without being eluted in a medium such as water during liquid immersion lithography and is easily dissolved in an alkaline developer. The upper layer-forming composition covers a photoresist film for forming a pattern by exposure to radiation. The composition comprises a resin dissolvable in a developer for the photoresist film and a solvent in which the resin is dissolved. The solvent has a viscosity of less than 5.2×10 −3 Pa·s at 20° C. In addition, the solvent does not cause intermixing of the photoresist film and the upper layer-forming composition. The solvent contains an ether or a hydrocarbon.
1. An upper layer-forming composition covering a photoresist film for forming a pattern by exposure to radiation, comprising a resin dissolvable in a developer for the photoresist film and a solvent in which the resin is dissolved,
wherein the solvent has a viscosity of less than 5.2×10 −3 Pa·s at 20° C.,
does not cause intermixing of the photoresist film and the upper layer-forming composition, and is a mixture of a compound shown by the following formula (1) and a monohydric alcohol solvent having 1 to 10 carbon atoms,
R 1 —O—R 2 (1)
wherein R 1 and R 2 individually represent a hydrocarbon group having 1 to 8 carbon atoms or a halogenated hydrocarbon group.
2. The upper layer-forming composition according to claim 1 , wherein the resin has at least one recurring unit selected from the group consisting of recurring units having a group shown by the following formula (2), (3), or (4), a carboxyl group, and a sulfo group, and has a weight average molecular weight measured by gel permeation chromatography of 2,000 to 100,000,
wherein, in the formula (2), R3 and R4 individually represent a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, or a fluoroalkyl group having 1 to 4 carbon atoms, in the formula (3), R5 represents a fluoroalkyl group having 1 to 20 carbon atoms, and, in the formula (4), R6 represents an organic group having a polar group.
3. The upper layer-forming composition according to claim 2 , further comprising at least one component selected from the group consisting of an acid component and an acid-generator component which generates an acid by being exposed to radiation.
4. A photoresist patterning method comprising a step of forming a photoresist film by applying a photoresist composition to a substrate, a step of forming an upper layer film on the photoresist film, and a step of forming a resist pattern by irradiating the photoresist film and the upper layer film with radiation using a liquid as a medium through a mask having a specific pattern, and developing the photoresist pattern,
wherein the step of forming an upper layer film is carried out using the upper layer-forming composition according to claim 3 .