Method for manufacturing evaporation donor substrate and light-emitting device
View Patent ↗An evaporation donor substrate which enables only a desired evaporation material to be evaporated at the time of deposition by an evaporation method, and capable of reduction in manufacturing cost by increase in use efficiency of the evaporation material and deposition with high uniformity. An evaporation donor substrate capable of controlling laser light so that a desired position of an evaporation donor substrate is irradiated with the laser light in accordance with the wavelength of the emitted laser light at the time of evaporation. Specifically, an evaporation donor substrate in which a region which reflects laser light and a region which absorbs laser light at the time of irradiation with laser light having a wavelength of greater than or equal to 400 nm and less than or equal to 600 nm at the time of evaporation are formed.
1. An evaporation donor substrate comprising:
a first function film formed over a substrate;
a reflective layer including an opening over the first function film;
a heat-insulating layer over the reflective layer;
a second function film over the first function film and the heat-insulating layer;
a light-absorbing layer over the second function film; and
a material layer over the light-absorbing layer,
wherein the first function film at a position overlapping with the reflective layer is a reflective film, and
wherein a stacked film of the first function film and the second function film formed at a position of the opening of the reflective layer is an anti-reflection film.
2. The evaporation donor substrate according to claim 1 , wherein when a wavelength of light is λ, a refractive index of the substrate is n 0 (λ), a refractive index of the first function film and the second function film is n 1 (λ), and a refractive index of the reflective layer is n 2 (λ), and the refractive index of the reflective layer (n 2 (λ)) is higher than the above-described other refractive indices, a thickness of the first function film is defined as follows:
in case of n 0 <n 1 , λ·m a1 /4n 1 (m a1 =even number), and
in case of n 1 <n 0 , λ·m a2 /4n 1 (m a2 =odd number).
3. The evaporation donor substrate according to claim 1 , wherein when a wavelength of light is λ, a refractive index of the substrate is n 0 (λ), a refractive index of the first function film and the second function film is n 1 (λ), and a refractive index of the light-absorbing layer is n 3 (λ), a thickness of the stacked film of the first function film and the second function film is defined as follows:
in case of n 0 <n 1 <n 3 , λ·m b1 /4n 1 (m b1 =odd number),
in case of n 0 <n 1 , n 3 <n 1 , λ·m b2 /4n 1 (m b2 =even number),
in case of n 1 <n 0 , n 1 <n 3 , λ·m b3 /4n 1 (m b3 =even number), and
in case of n 3 <n 1 <n 0 , λ·m b4 /4n 1 (m b4 =odd number).
4. The evaporation donor substrate according to claim 1 , wherein the light-absorbing layer comprises a metal nitride.
5. The evaporation donor substrate according to claim 4 , wherein the metal nitride includes any of titanium nitride, tantalum nitride, tungsten nitride, or molybdenum nitride.
6. The evaporation donor substrate according to claim 1 , wherein each of the first function film and the second function film is formed using any of silicon oxide, silicon nitride, silicon oxynitride, or silicon nitride oxide.
7. The evaporation donor substrate according to claim 1 , wherein the reflective layer has a reflectance of greater than or equal to 85% with respect to light.
8. The evaporation donor substrate according to claim 1 , wherein the reflective layer contains any of aluminum, silver, gold, platinum, copper, an alloy containing aluminum, an alloy containing silver, or indium tin oxide.
9. The evaporation donor substrate according to claim 1 , wherein the heat-insulating layer contains any of titanium oxide, silicon oxide, silicon nitride, silicon oxynitride, silicon nitride oxide, or zirconium oxide.
10. The evaporation donor substrate according to claim 1 , wherein the material layer comprises an organic compound.
11. The evaporation donor substrate according to claim 1 , wherein the material layer contains one or both of a light-emitting material and a carrier-transporting material.
12. An evaporation donor substrate comprising:
a first function film having an opening over a substrate;
a reflective layer over the first function film;
a heat-insulating layer over the reflective layer;
a second function film over the substrate and the heat-insulating layer;
a light-absorbing layer over the second function film; and
a material layer over the light-absorbing layer,
wherein the first function film is a reflective film, and
wherein the second function film is an anti-reflection film.
13. The evaporation donor substrate according to claim 12 , wherein when a wavelength of light is λ, a refractive index of the substrate is n 0 (λ), a refractive index of the first function film is n 1 ′ (λ), and a refractive index of the reflective layer is n 2 (λ), and the refractive index of the reflective layer (n 2 (λ) is higher than the above-described other refractive indices, a thickness of the first function film is defined as follows:
in case of n 0 <n 1 ′, λ·m a3 /4n 1 ′ (m a3 =even number), and
in case of n 1 ′<n 0 , λ·m a4 /4n 1 ′ (m a4 =odd number).
14. The evaporation donor substrate according to claim 12 , wherein when a wavelength of light is λ, a refractive index of the substrate is n 0 (λ), a refractive index of the second function film is n 1 ″ (λ), and a refractive index of the light-absorbing layer is n 3 (λ), a thickness of the second function film is defined as follows:
in case of n 0 <n 1 ″<n 3 , λ·m b5 /4n 1 ″ (m b5 =odd number),
in case of n 3 <n 1 ″<n 0 , λ·m b6 /4n 1 ″ (m b6 =odd number),
in case of n 1 ″<n 0 , n 1 ″<n 3 , λ·m b7 /4n 1 ″ (m b7 =even number), and
in case of n 0 <n 1 ″, n 3 <n 1 ″, λ·m b8 /4n 1 ″ (m b8 =even number).
15. The evaporation donor substrate according to claim 12 , wherein the light-absorbing layer comprises a metal nitride.
16. The evaporation donor substrate according to claim 15 , wherein the metal nitride includes any of titanium nitride, tantalum nitride, tungsten nitride, or molybdenum nitride.
17. The evaporation donor substrate according to claim 12 , wherein each of the first function film and the second function film is formed using any of silicon oxide, silicon nitride, silicon oxynitride, or silicon nitride oxide.
18. The evaporation donor substrate according to claim 12 , wherein the reflective layer has a reflectance of greater than or equal to 85% with respect to light.
19. The evaporation donor substrate according to claim 12 , wherein the reflective layer contains any of aluminum, silver, gold, platinum, copper, an alloy containing aluminum, an alloy containing silver, or indium tin oxide.
20. The evaporation donor substrate according to claim 12 , wherein the heat-insulating layer contains any of titanium oxide, silicon oxide, silicon nitride, silicon oxynitride, silicon nitride oxide, or zirconium oxide.
21. The evaporation donor substrate according to claim 12 , wherein the material layer comprises an organic compound.
22. The evaporation donor substrate according to claim 12 , wherein the material layer contains one or both of a light-emitting material and a carrier-transporting material.