Radiation-sensitive resin composition

1. A radiation-sensitive resin composition comprising:

an acid-dissociable group-containing resin comprising a copolymer containing a repeating unit;

a radiation-sensitive acid generator; and

a solvent,

wherein the repeating unit comprises an acid-dissociable group-containing repeating unit in an amount of more than about 55 mol % with respect to a total amount of the repeating unit in the copolymer, and a content of the copolymer in the acid-dissociable group-containing resin is about 90 mass % or more with respect to a total amount of the acid-dissociable group-containing resin.

2. The composition according to claim 1 , wherein the acid-dissociable group-containing repeating unit is shown by the following formula (1) or (2),

wherein R 1 and R 3 individually represent a hydrogen atom, a methyl group, or a trifluoromethyl group, and R 2 and R 4 individually represent a hydrogen atom or a substituted or unsubstituted alkyl group having 1 to 4 carbon atoms.

3. The composition according to claim 1 , wherein the radiation-sensitive acid generator comprises a radiation-sensitive acid generator shown by the following formula (6) or (7),

wherein R 14 individually represents a hydrogen atom, a fluorine atom, a hydroxyl group, an alkyl group having 1 to 10 carbon atoms, an alkoxyl group, or an alkoxycarbonyl group having 2 to 11 carbon atoms, R 15 individually represents a hydrogen atom or a linear or branched alkyl group having 1 to 4 carbon atoms, n represents 0 or 1, R 16 and R 17 individually represent a hydrogen atom or a linear or branched alkyl group having 1 to 4 carbon atoms, or in combination form a 3 to 6-membered ring structure together with the sulfur atom, and Y − represents a sulfur atom-containing anion.

4. The composition according to claim 3 , wherein the radiation-sensitive acid generator comprises at least three different types of radiation-sensitive acid generators.

5. The composition according to claim 1 , wherein the acid-dissociable group-containing resin further comprises a repeating unit having a lactone skeleton.

6. The composition according to claim 2 , wherein the acid-dissociable group-containing resin comprises a copolymer (CP-1) or (CP-2) respectively comprising the following repeating units,

wherein R 12 and R 13 individually represent a hydrogen atom or a methyl group.

7. The composition according to claim 1 , further comprising an acid diffusion controller.

8. The composition according to claim 7 , wherein the acid diffusion controller comprises a nitrogen-containing compound.