Semiconductor structure
View Patent ↗A desired property for a metal gate electrode layer is that it can cover a three-dimensional semiconductor structure having a microstructure with high step coverage. Another desired property for the metal gate electrode layer is that the surface of a deposited electrode layer is flat on a nanometer scale, enables a dielectric layer for electrical insulation to be coated without performing special planization after deposition of the electrode layer. Furthermore, another desired property for the metal gate electrode layer is that it has the similar etching workability to materials used in an ordinary semiconductor manufacturing process. Furthermore, another desired property for the metal gate electrode layer is that it has a structure in which diffusion of impurity is suppressed due to homogeneity thereof and the absence of grain boundaries. It was found that an amorphous metal electrode is most suitable for realizing the metal gate electrode layer satisfying the above-mentioned properties and thereby the present invention was achieved.
1. A semiconductor structure comprising:
a semiconductor;
a dielectric layer covering the semiconductor; and
an electrode layer covering the dielectric layer, wherein
the electrode layer has an amorphous structure with a surface roughness of 1 nm or less and a resistivity of 1 mΩcm formed by metal-organic chemical vapor deposition (MOCVD) method or atomic layer deposition (ALD) by using activated particles,
the semiconductor is arranged to stand on a substrate, and
the dielectric layer and the electrode layer cover at least one side face of the semiconductor.
2. The semiconductor structure according to claim 1 , wherein a part of or the entirety of the electrode layer covers a side face standing inclined at from 70° to 90° to the substrate, and a ratio of the thickness of the electrode layer covering an upper portion of the side face to the thickness of the electrode layer covering a lower portion of the side face is in a range of 0.9 to 1.2.
3. The semiconductor structure according to claim 1 , wherein the electrode layer is a Ru oxide.
4. The semiconductor structure according to claim 1 , wherein resistivity of the electrode layer is between 70 μΩcm and 1 mΩcm.
5. The semiconductor structure according to any one of claims 1 , 2 , 3 and 4 , wherein the semiconductor structure configures a memory device having a threshold voltage controlled by trapped electric charges at trap levels in the dielectric layer.
6. The semiconductor structure according to any one of claims 1 , 2 , 3 and 4 , wherein the amorphous structure of the electrode layer contains from 0.001% to 5% of carbon.