Method for producing light-emitting diode
The present invention provides a method for producing a light-emitting diode, the method comprising a lamination step of forming a laminated semiconductor layer by sequentially laminating an n-type semiconductor layer, a light-emitting layer and a p-type semiconductor layer onto a substrate, as well as forming a plurality of reflective p-type electrodes on top of the p-type semiconductor layer, a plating step of forming a seed layer that covers the reflective p-type electrodes and the p-type semiconductor layer, and fowling a plating layer on top of the seed layer, a removal step of removing the substrate from the n-type semiconductor layer, thereby exposing a light extraction surface of the n-type semiconductor layer, and an electrode formation step of performing dry etching of the light extraction surface of the n-type semiconductor layer using an etching gas containing the same element as a dopant element within the n-type semiconductor layer, and subsequently forming an n-type electrode on the light extraction surface.
1. A method for producing a light-emitting diode, said method comprising:
a lamination step of forming a laminated semiconductor layer by sequentially laminating an n-type semiconductor layer, a light-emitting layer and a p-type semiconductor layer onto a substrate, as well as forming a plurality of reflective p-type electrodes on top of the p-type semiconductor layer,
a plating step of forming a seed layer that covers the reflective p-type electrodes and the p-type semiconductor layer, and forming a plating layer on top of the seed layer,
a removal step of removing the substrate from the n-type semiconductor layer, thereby exposing a light extraction surface of the n-type semiconductor layer, and
an electrode formation step of performing dry etching of the light extraction surface of the n-type semiconductor layer using an etching gas comprising an identical element to a dopant element within the n-type semiconductor layer, and subsequently forming an n-type electrode on the light extraction surface.
2. The method for producing a light-emitting diode according to claim 1 , wherein the dopant element within the n-type semiconductor layer is silicon, and the etching gas is a silicon halide.
3. The method for producing a light-emitting diode according to claim 1 , wherein in the lamination step, the reflective p-type electrodes are formed using an RF sputtering method.
4. The method for producing a light-emitting diode according to claim 1 , wherein
in the plating step, following formation of the seed layer, an isolating photoresist is formed along boundary portions that mutually isolate the plurality of reflective p-type electrodes, and the plating layer is then formed so as to cover the isolating photoresist,
a partitioning step of forming partitioning slots in the laminated semiconductor layer on a side of the light extraction surface side and along the isolating photoresist at the boundary portions is provided between the removal step and the electrode formation step, and a dicing step is provided in which, following the electrode formation step, the plating layer is polished until a portion of the isolating photoresist is exposed, the isolating photoresist is removed to provide additional partitioning slots in the plating layer, and the seed layer is then cut along the partitioning slots and the additional partitioning slots.
5. The method for producing a light-emitting diode according to claim 1 , wherein
in the plating step, following formation of the seed layer, an isolating photoresist is formed along boundary portions that mutually isolate the plurality of reflective p-type electrodes, and the plating layer is then formed so as to cover the isolating photoresist,
a partitioning step of forming partitioning slots in the laminated semiconductor layer on a side of the light extraction surface side and along the isolating photoresist at the boundary portions is provided between the removal step and the electrode formation step, and
an additional partitioning step is provided in which, following the electrode formation step, the plating layer is polished until a portion of the isolating photoresist is exposed, and a mechanical stress is then applied, thereby partitioning the laminated semiconductor layer and the plating layer along the partitioning slots.
6. The method for producing a light-emitting diode according to claim 4 , wherein an insulating film formation step of forming a protective insulating film on each partitioning surface of the semiconductor layer that has been partitioned into a plurality of segments by the partitioning slots is provided between the partitioning step and the electrode formation step.
7. The method for producing a light-emitting diode according to claim 5 , wherein an insulating film formation step of forming a protective insulating film on each partitioning surface of the semiconductor layer that has been partitioned into a plurality of segments by the partitioning slots is provided between the partitioning step and the electrode formation step.
8. The method for producing a light-emitting diode according to claim 6 , wherein a surface roughening step of roughening the light extraction surface of the n-type semiconductor layer is provided between the insulating film formation step and the electrode formation step.
9. The method for producing a light-emitting diode according to claim 7 , wherein a surface roughening step of roughening the light extraction surface of the n-type semiconductor layer is provided between the insulating film formation step and the electrode formation step.
10. The method for producing a light-emitting diode according to claim 2 , wherein in the lamination step, the reflective p-type electrodes are formed using an RF sputtering method.
11. The method for producing a light-emitting diode according to claim 2 , wherein
in the plating step, following formation of the seed layer, an isolating photoresist is formed along boundary portions that mutually isolate the plurality of reflective p-type electrodes, and the plating layer is then formed so as to cover the isolating photoresist,
a partitioning step of forming partitioning slots in the laminated semiconductor layer on a side of the light extraction surface side and along the isolating photoresist at the boundary portions is provided between the removal step and the electrode formation step, and
a dicing step is provided in which, following the electrode formation step, the plating layer is polished until a portion of the isolating photoresist is exposed, the isolating photoresist is removed to provide additional partitioning slots in the plating layer, and the seed layer is then cut along the partitioning slots and the additional partitioning slots.
12. The method for producing a light-emitting diode according to claim 2 , wherein
in the plating step, following formation of the seed layer, an isolating photoresist is formed along boundary portions that mutually isolate the plurality of reflective p-type electrodes, and the plating layer is then formed so as to cover the isolating photoresist,
a partitioning step of forming partitioning slots in the laminated semiconductor layer on a side of the light extraction surface side and along the isolating photoresist at the boundary portions is provided between the removal step and the electrode formation step, and
an additional partitioning step is provided in which, following the electrode formation step, the plating layer is polished until a portion of the isolating photoresist is exposed, and a mechanical stress is then applied, thereby partitioning the laminated semiconductor layer and the plating layer along the partitioning slots.